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Low Loss Sol-Gel TiO2 Thin Films for Waveguiding Applications

机译：用于波导应用的低损耗Sol-Gel TiO2薄膜

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TiO2 thin films were synthesized by sol-gel process: titanium tetraisopropoxide (TTIP) was dissolved in isopropanol, and then hydrolyzed by adding a water/isopropanol mixture with a controlled hydrolysis ratio. The as prepared sol was deposited by “dip-coating” on a glass substrate with a controlled withdrawal speed. The obtained films were annealed at 350 and 500 °C (2 h). The morphological properties of the prepared films were analyzed by Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM). The optical waveguiding properties of TiO2 films were investigated for both annealing temperature using m-lines spectroscopy. The refractive indices and the film thickness were determined from the measured effective indices. The results show that the synthesized planar waveguides are multimodes and demonstrate low propagation losses of 0.5 and 0.8 dB/cm for annealing temperature 350 and 500 °C, respectively.
机译：通过溶胶-凝胶法合成TiO2薄膜：将四异丙醇钛（TTIP）溶解在异丙醇中，然后通过添加水解率受控的水/异丙醇混合物进行水解。所制备的溶胶通过“浸涂”以受控的撤出速度沉积在玻璃基板上。将获得的膜在350和500°C（2 h）退火。通过扫描电子显微镜（SEM）和原子力显微镜（AFM）分析所制备的膜的形态学性质。使用m-线光谱法研究了两种退火温度下TiO2薄膜的光波导特性。由测得的有效指数确定折射率和膜厚度。结果表明，合成平面波导是多模的，并且分别在350和500°C的退火温度下具有0.5和0.8 dB / cm的低传播损耗。

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