Investigation of Nano Structural Changes by Annealing Temperature and Uniform Oxygen Flow on Ti Layers | Science Publications

Haleh Kangarlou; Saeid Rafizadeh

首页> 外文期刊>American journal of applied sciences >Investigation of Nano Structural Changes by Annealing Temperature and Uniform Oxygen Flow on Ti Layers | Science Publications

【24h】

Investigation of Nano Structural Changes by Annealing Temperature and Uniform Oxygen Flow on Ti Layers | Science Publications

机译：退火温度和均匀氧流在钛层上的纳米结构变化研究科学出版物

获取原文

掌桥外文数据库（机构版） >>

开具论文收录证明 >>

文献代查 >>

页面导航

摘要
著录项
相似文献
相关主题

摘要

> Problem statement: Ti films of the same thickness, deposition angle (near normal) and deposition rate were deposited on glass substrates at room temperature under UHV conditions. Approach: Different annealing temperatures 423 K, 523 K and 623 K with uniform 7 cm³ sec^-1, oxygen flow, were used to produce titanium oxide layers. Results: Thin film structures were studied using AFM, XRD and spectrophotometer methods. Roughness of the films changed due to annealing process. Conclusion/Recommendations: The getting property of Ti and annealing temperature can play an important role on the structure of the films.

机译： > 问题陈述：在室温下，在超高压条件下，将具有相同厚度，沉积角度（接近法线）和沉积速率的Ti膜沉积在玻璃基板上。方法：使用不同的退火温度423 K，523 K和623 K以均匀的7 cm ^{3 sec ^{-1 （氧气流量）进行生产氧化钛层。结果：采用原子力显微镜，X射线衍射和分光光度计对薄膜结构进行了研究。膜的粗糙度由于退火过程而改变。结论/建议： Ti的获取性能和退火温度对薄膜的结构起着重要的作用。}} 展开▼

著录项

来源
《American journal of applied sciences》 |2011年第8期|共页

作者
Haleh Kangarlou; Saeid Rafizadeh;
展开▼

作者单位

展开▼

收录信息

原文格式 PDF

正文语种

中图分类自然科学研究方法;

关键词

相似文献

外文文献

中文文献

专利

1. Investigation of Nano Structural Changes by Annealing Temperature and Uniform Oxygen Flow on Ti Layers [J] . Haleh Kangarlou, Saeid Rafizadeh American journal of applied sciences . 2011,第8期

机译：退火温度和均匀氧流对钛层的纳米结构变化的研究

2. Investigations about the effect of annealing temperatures in the presence of oxygen flow on optical and electronic properties of titanium nano-layers by using Kramers-Kronig and DFT methods [J] . Kangarlou Haleh, Aghgonbad Maryam Motallebi, Abdollahi Arash Materials science in semiconductor processing . 2015,第Null期

机译：使用Kramers-Kronig和DFT方法研究在氧气流动下退火温度对钛纳米层的光学和电子性能的影响

3. Influence of the annealing temperature of the Bi4Ti3O12 seeding layer on the structural and electrical properties of Bi3.15Nd0.85Ti2.99Mn0.01O12 thin films [J] . Zhang W. L., Tang M. H., Xiong Y., RSC Advances . 2016,第91期

机译：Bi4Ti3O12晶种层的退火温度对Bi3.15Nd0.85Ti2.99Mn0.01O12薄膜的结构和电性能的影响

4. Effect of annealing temperature on Structure and Performance of Nano Ti/IrO2/MnO2 Electrode by Anodic Deposition for Oxygen Evolution [C] . Zhijun Chen, rnWei Hong, rnZhenqi Kuai, The 6th China international conference on nanoscience and technology . 2007

机译：退火温度对阳极析氧放氧纳米Ti / IrO2 / MnO2电极结构和性能的影响

5. Scanning tunneling microscopy studies of growth medium & temperature dependent structural phases of alkanethiol self-assembled monolayers, reactive self-assembled monolayers, & flat gold nanoparticle/indium tin oxide substrates and a scanning surface photovoltage microscopy study for local mechanical stress characterization in complementary metal oxide semiconductor devices. [D] . Dahanayaka, Dahanayaka Liyanage Daminda Hemal. 2010

机译：烷烃硫醇自组装单分子层，反应性自组装单分子层，扁平金纳米颗粒/铟锡氧化物基质的生长介质和温度依赖性结构相的扫描隧道显微镜研究，以及互补金属氧化物中局部机械应力表征的扫描表面光电压显微镜研究半导体器件。

6. Controlling Growth High Uniformity Indium Selenide (In2Se3) Nanowires via the Rapid Thermal Annealing Process at Low Temperature [O] . Ya-Chu Hsu, Yu-Chen Hung, Chiu-Yen Wang 2017

机译：通过低温快速热退火工艺控制生长高均匀性的硒化铟（In2Se3）纳米线

7. Investigation of Nano Structural Changes by Annealing Temperature and Uniform Oxygen Flow on Ti Layers [O] . Haleh Kangarlou, Saeid Rafizadeh 2011

机译：退火温度和均匀氧流对钛层的纳米结构变化的研究

1. 退火温度和ZnO缓冲层对氨化Ga2O3/ZnO薄膜合成GaN纳米结构的影响 [J] . 王书运 ,庄惠照 ,高海永 . 材料科学与工程学报 . 2006,第004期

2. 均匀沉淀法合成纳米钛酸锌及其形态结构分析 [J] . 郭光美 ,丁士文 . 无机盐工业 . 2006,第006期

3. 以偏钛酸（硫酸钛,硫酸氧钛）为原料制备纳米二氧化钛 [J] . 祖庸 ,任莉 . 钛工业进展 . 1997,第001期

4. 用硫酸氧钛制备纳米二氧化钛的研究进展 [J] . 李宗任 ,陈小泉 ,刘焕彬 . 涂料工业 . 2009,第002期

5. 钛氧有机化合物常压低温液相合成纳米二氧化钛晶体的研究 [J] . 陈小泉 ,古国榜 . 无机化学学报 . 2002,第007期

6. 纳米晶体Ｎｉ－Ｐ合金晶粒微观结构随退火温度的变化 [C] . 隋曼龄 . 第二届中国功能材料及其应用学术会议 . 1995

7. 一次强对流引起的上对流层-下平流层结构变化和对流层-平流层交换 [A] . 蔡雯昳 . 2017

1. 一种面向全球变化研究的空间科学数据自动汇聚方法 [P] . 中国专利： CN102254030B . 2013.04.10

2. 面向全球变化研究的空间科学数据元数据自动汇聚方法 [P] . 中国专利： CN102289483B . 2012.12.19

3. Superconducting recovery method by joining 2nd generation ReBCO high temperature superconductor using partial fine melt diffusion welding by direct contact of high temperature superconductor layer and annealing with oxygen supply annealing [P] . 外国专利： JP2015504573A . 2015-02-12

机译：通过高温超导体层直接接触并通过供氧退火进行局部微熔扩散焊接来连接第二代ReBCO高温超导体的超导恢复方法

4. Superconducting recovery method by joining 2nd generation ReBCO high temperature superconductor using partial fine melt diffusion welding by direct contact of high temperature superconductor layer and annealing with oxygen supply annealing [P] . 外国专利： JP5770947B2 . 2015-08-26

机译：通过高温超导体层直接接触并通过供氧退火进行局部微熔扩散焊接来连接第二代ReBCO高温超导体的超导恢复方法

5. METHOD OF PERSISTENT CURRENT MODE SPLICING OF 2G ReBCO HIGH TEMPERATURE SUPERCONDUCTORS USING SOLID STATE PRESSURIZED ATOMS DIFFUSION BY DIRECT FACE-TO-FACE CONTACT OF HIGH TEMPERATURE SUPERCONDUCTING LAYERS AND RECOVERING SUPERCONDUCTIVITY BY OXYGENATION ANNEALING [P] . 外国专利： US2015357089A1 . 2015-12-10

机译：固态加压原子扩散直接通过高温超导层的面对面接触和通过氧恢复超导性的固态加压原子在2G ReBCO高温超导体上进行持续电流模式拼接的方法

相关主题

Investigation of Nano Structural Changes by Annealing Temperature and Uniform Oxygen Flow on Ti Layers | Science Publications

摘要

著录项

相似文献

相关主题

期刊订阅