Reactor optimisation for the production of homogeneous large area amorphous silicon solar cells on flexible substrates

J. D. Saunderson

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Reactor optimisation for the production of homogeneous large area amorphous silicon solar cells on flexible substrates

机译：优化反应器以在柔性基板上生产均匀的大面积非晶硅太阳能电池

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Results are presented on the optimisation of the configuration of a large area pilot plant for the production of thin films of hydrogen-ated amorphous silicon (a-Si:H). The basic design of the reactor is discussed, and the correlation between the configuration inside the reactor and the resulting homogeneity of the material is demonstrated. It is indicated that the homogeneity is mainly determined by the shape of the antenna, the distance between the antenna and the substrate, the direction and position of the gas inlet and the dilution of the reactive gasses with hydrogen. A homogeneity factor of 2,5% was obtained across a substrate area of 320 mm x 300 mm.

机译：提出了优化用于生产氢化非晶硅（a-Si：H）薄膜的大面积中试装置的配置的结果。讨论了反应器的基本设计，并说明了反应器内部构型与所得材料均匀性之间的相关性。结果表明，均匀性主要取决于天线的形状，天线与基板之间的距离，进气口的方向和位置以及反应性气体被氢气的稀释程度。在320 mm x 300 mm的基板面积上获得的均匀度为2.5％。

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《Suid-Afrikaanse Tydskrif vir Natuurwetenskap en Tegnologie》 |1998年第2期|共4页
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J. D. Saunderson;
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2. Hydrogenated Amorphous Silicon Solar Cells on Textured Flexible Substrate Copied From a Textured Glass Substrate Template [J] . Yang C.-H., Hsueh C.-Y., Yeh D.-J., Electron Device Letters, IEEE . 2011,第9期

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3. Enhanced performance of amorphous silicon solar cells (110 ℃) on flexible substrates with a-SiC:H(p) window layer and H_2 plasma treatment at n/i and i/p interface [J] . Madaka Ramakrishna, Kanneboina Venkanna, Agarwal Pratima Semiconductor science and technology . 2018,第8期

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4. AMORPHOUS SILICON / AMORPHOUS SILICON GERMANIUM TANDEM SOLAR CELLS ON FLEXIBLE POLYIMIDE SUBSTRATES [C] . Cheng Liu, Zhengjun Xu, JunkunYang The 22nd International photovoltaic science and engineering conference . 2012

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5. Electronic and photonic devices: Experimental investigations of hydrogenated amorphous silicon substrate n(+)/i/p(+) solar cell and fundamental properties of quantum wells with cylindrical geometry and applications to electronics and photonics [D] . Ping, Er-Xuan 1995

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7. Reactor optimisation for the production of homogeneous large area amorphous silicon solar cells on flexible substrates [O] . J. D. Saunderson 1998

机译：用于在柔性基板上生产均匀大面积非晶硅太阳能电池的反应器优化
8. Measurment of Depositing and Bombarding Species Involved in the Plasma Production of Amorphous Silicon and Silicon/Germanium Solar Cells. Annual Technical Report for June 1, 2002 to May 31, 2005 [R] . Gallagher, A. 2006

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Reactor optimisation for the production of homogeneous large area amorphous silicon solar cells on flexible substrates

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