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首页> 外文期刊>Transactions on Electrical and Electronic Materials >Control of De-Lamination Phenomena in LTCC Zero-Shrinkage by Glass Infiltration Method
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Control of De-Lamination Phenomena in LTCC Zero-Shrinkage by Glass Infiltration Method

机译：玻璃渗透法控制LTCC零收缩中的分层现象

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摘要

A zero-shrinkage sintering process in which the shrinkage of x-y axis is controlled to be zero is in great demand due to the trend of high integration in the ceramic modules. Among the zero-shrinkage sintering processes that are available, the proposed glass infiltration method where the viscous but fluidic glass infiltrates of the particles in the structure of /glass/ during firing is one of the applicable methods. However, the above proposed glass infiltration method has the problem of the warpage-like delamination. This occurred at the outermost surface of the multiple-bundle substrate. It is thought that the decomposed gas rapidly expands in low viscous glass to create vacant space. To solve this problem, the vacant space was tamped with particles to lead to the actual improvement of the sintered properties. With 15 wt% of tamping particles in glass, most of the vacant space disappeared. Fully densified zero-shrinkage substrate without delamination can be obtained.
机译：由于陶瓷模块中的高集成度的趋势，迫切需要将x-y轴的收缩率控制为零的零收缩率烧结工艺。在可用的零收缩烧结工艺中，所提出的玻璃渗透方法是可应用的方法之一，其中在烧结过程中，粘性的但流体的玻璃渗透到/ glass /结构中的颗粒是有效的。然而，以上提出的玻璃渗透方法具有翘曲状分层的问题。这发生在多束基板的最外表面。据认为，分解后的气体在低粘度玻璃中迅速膨胀而产生空余空间。为了解决这个问题，在空的空间上填上了颗粒，以实际改善烧结性能。在玻璃中有15 wt％的捣固颗粒时，大部分空闲空间都消失了。可以获得没有分层的完全致密的零收缩基材。

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