Enhanced Mechanical Properties in Organofluorosilica Thin Films

MarioPagliaro; GiovanniPalmisano; EricLe Bourhis; RosariaCiriminna; Laura M.Ilharco; AlexandraFidalgo

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Enhanced Mechanical Properties in Organofluorosilica Thin Films

机译：有机氟二氧化硅薄膜中增强的机械性能

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Fluorinated hybrid organic-inorganic silicates (ORMOSIL) thin films display exceptional mechanical properties in terms of both hardness and elastic modulus that can be finely tuned by varying the angular velocity of the spin coating process. Hence, as traditional alkyl-modified silica xerogels generally show poor mechanical behavior, these materials offer a solution to a major limitation to applicability of ORMOSIL-based films.

机译：氟化杂化有机-无机硅酸盐（ORMOSIL）薄膜在硬度和弹性模量方面均显示出卓越的机械性能，可以通过改变旋涂工艺的角速度来对其进行精细调节。因此，由于传统的烷基改性的二氧化硅干凝胶通常表现出较差的机械性能，因此这些材料为解决基于ORMOSIL的薄膜的适用性带来重大限制提供了解决方案。

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《Journal of nanomaterials》 |2008年第1期|共5页
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MarioPagliaro; GiovanniPalmisano; EricLe Bourhis; RosariaCiriminna; Laura M.Ilharco; AlexandraFidalgo;
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4. Physical Properties of Thin Films and Nanostructures: Mechanical Properties of Thin Films [C] . Vinod Tewary, Donna Hurley Materials Science and Engineering Laboratory, Materials Reliability Division FY Programs and Accomplishments . 2003

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7. Enhanced Mechanical Properties in Organofluorosilica Thin Films [O] . Mario Pagliaro, Giovanni Palmisano, Eric Le Bourhis, 2008

机译：有机氟磷薄膜中的机械性能增强

Enhanced Mechanical Properties in Organofluorosilica Thin Films

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