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首页> 外文期刊>Scientific reports. >Surface step terrace tuned microstructures and dielectric properties of highly epitaxial CaCu3Ti4O12 thin films on vicinal LaAlO3 substrates
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Surface step terrace tuned microstructures and dielectric properties of highly epitaxial CaCu3Ti4O12 thin films on vicinal LaAlO3 substrates

机译:高度外延CaCu3Ti4O12薄膜在邻近拉马洛3衬底上高度外延CaCu3Ti4O12薄膜的表面步骤露天度和介电性能

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Controllable interfacial strain can manipulate the physical properties of epitaxial films and help understand the physical nature of the correlation between the properties and the atomic microstructures. By using a proper design of vicinal single-crystal substrate, the interface strain in epitaxial thin films can be well controlled by adjusting the miscut angle via a surface-step-terrace matching growth mode. Here, we demonstrate that LaAlO3 (LAO) substrates with various miscut angles of 1.0°, 2.75°, and 5.0° were used to tune the dielectric properties of epitaxial CaCu3Ti4O12 (CCTO) thin films. A model of coexistent compressive and tensile strained domains is proposed to understand the epitaxial nature. Our findings on the self-tuning of the compressive and tensile strained domain ratio along the interface depending on the miscut angle and the stress relaxation mechanism under this growth mode will open a new avenue to achieve CCTO films with high dielectric constant and low dielectric loss, which is critical for the design and integration of advanced heterostructures for high performance capacitance device applications.
机译:可控界面菌株可以操纵外延膜的物理性质,并有助于了解性质与原子微结构之间的相关性的物理性质。通过使用正晶体基板的适当设计,通过通过表面阶梯匹配的生长模式调节模拟角度,可以很好地控制外延薄膜中的界面应变。在此,我们证明了具有1.0°,2.75°和5.0°的各种模拟角度的LaAlO3(LaO)基材用于调整外延CaCu3Ti4O12(CCTO)薄膜的介电性能。提出了一种共存压缩和拉伸带状域的模型,以了解外延性质。我们对沿着界面的压缩和拉伸应变域比的自我调整的调查结果,这取决于这种生长模式下的爆炸角度和应力松弛机构将开启新的途径,以实现具有高介电常数和低介电损耗的基准膜,这对于高性能电容设备应用的先进异质结构的设计和集成至关重要。

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