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首页> 外文期刊>Shock and vibration >Modal-Decomposition-Dependent State-Space Modeling and Modal Analysis of a Rigid-Flexible, Coupled, Multifreedom Motion System: Theory and Experiment
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Modal-Decomposition-Dependent State-Space Modeling and Modal Analysis of a Rigid-Flexible, Coupled, Multifreedom Motion System: Theory and Experiment

机译：模态分解依赖性状态空间建模和模态分析对刚性，耦合，多雷德罗EDOM运动系统的模拟分析：理论与实验

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摘要

In a multiple degrees of freedom motion system with rigid-flexible coupling, the flexible internal dynamics have a significant negative impact on performance because the degrees of freedom are coupled. Inspired by this problem, a multi-input multioutput state-space model based on modal coordinates is proposed to decouple the rigid body and flexible modes. The closed-loop subspace identification method based on orthogonal is utilized to develop an unbiased standard state-space model. Based on the similarity principle, a modal analysis method is proposed to transfer the standard state-space model to the proposed modal-decomposition-dependent state-space model. Controllability and observability criteria are met to guarantee the minimum realization of the proposed state-space model. Finally, a modeling and modal analysis experiment is conducted on a developed wafer stage of lithographic tool. The results verify the effectiveness and accuracy of the proposed modeling method, as well as the controllability and observability of the proposed model.
机译：在具有刚性柔性耦合的多程度的自由度运动系统中，柔性内部动态具有对性能的显着负面影响，因为自由度耦合。受到这个问题的启发，提出了一种基于模态坐标的多输入多输出状态空间模型，以解除刚体和灵活模式。基于正交的闭环子空间识别方法用于开发一个不偏不偏的标准状态空间模型。基于相似性原理，提出了一种模态分析方法来将标准状态空间模型转换为所提出的模态分解依赖性状态空间模型。满足可控性和可观察性标准，以保证所提出的状态空间模型的最小实现。最后，在光刻工具的开发晶片阶段进行建模和模态分析实验。结果验证了所提出的建模方法的有效性和准确性，以及所提出的模型的可控性和可观察性。

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