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Flexible and highly sensitive pressure sensors based on microcrack arrays inspired by scorpions

机译：基于蝎子的微裂纹阵列的柔性且高灵敏度的压力传感器

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Recently, there has been tremendous interest in flexible pressure sensors to meet the technological demands of modern society. For practical applications, pressure sensors with high sensitivity at small strains and low detection limits are highly desired. In this paper, inspired by the slit sensillum of the scorpion, a flexible pressure sensor is presented which has regular microcrack arrays and its reversed pattern acts as a tunable contact area of the sensing material microstructures. The template with regular crack arrays generated on the inner surface is fabricated using a solvent-induced swelling method, which provides a simple and economical way to obtain the controllable fabrication of crack arrays without any physical damage to materials. At the same time, the working principle of the bio-inspired pressure sensor is attributed to pressure-dependent variations because of the contact area change between the interlocking polydimethylsiloxane films with the negative and positive patterns of the microcrack arrays. The device shows good performance, with a gauge factor of 27.79 kPa ~(?1) (0–2.4 kPa), a short response/recovery time (111/95 ms), a low detectable pressure limit and excellent reproducibility over 3000 cycles. Practical applications, such as the detection of human motion and touch sensing, are then tested in this work, and the results imply that it should have significant potential applications in numerous fields. Note that the reversed pattern of the slit sensillum of the scorpion is explored to enhance the performance of pressure sensors, thus opening a new route for the fabrication of flexible pressure sensors, even wearable electronics, in a cost-effective and scalable manner.
机译：最近，对灵活压力传感器的巨大兴趣，以满足现代社会的技术需求。对于实际应用，非常需要在小菌株和低检测限度下具有高灵敏度的压力传感器。在本文中，由蝎子的狭缝传感器的启发，提出了一种柔性压力传感器，其具有规则的微裂纹阵列及其反转模式作为感测材料微结构的可调谐接触面积。使用溶剂诱导的溶胀方法制造具有在内表面上产生的常规裂缝阵列的模板，该方法提供了一种简单且经济的方法，以获得裂缝阵列的可控制造而没有对材料的任何物理损坏。同时，生物启发压力传感器的工作原理归因于压力依赖性变化，因为互锁聚二甲基硅氧烷膜与微裂纹阵列的负和正图案之间的接触面积变化。该器件显示出良好的性能，规格系数为27.79kPa〜（α1）（0-2.4 kPa），短响应/恢复时间（111/95ms），可检测到的压力限制低，再现超过3000周期。然后在这项工作中测试了人类运动和触摸感测的实际应用，例如人体运动和触摸感测，结果意味着它应该在许多领域具有显着的潜在应用。注意，探索了蝎子的狭缝传感器的反向模式以提高压力传感器的性能，从而以经济效益和可扩展的方式打开柔性压力传感器，甚至可穿戴电子设备的新途径。

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