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首页> 外文期刊>Journal of Materials Chemistry, C. materials for optical and electronic devices >A highly sensitive and flexible capacitive pressure sensor based on a micro- arrayed polydimethylsiloxane dielectric layer
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A highly sensitive and flexible capacitive pressure sensor based on a micro- arrayed polydimethylsiloxane dielectric layer

机译：基于微量排列的聚二甲基硅氧烷介电层的高灵敏度和柔性电容式压力传感器

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摘要

A flexible pressure sensor with high sensitivity has been proposed which consists of a typical sandwich structure by integrating a polydimethylsiloxane (PDMS) substrate with a micro-arrayed PDMS dielectric layer. A PDMS flexible substrate coated with silver nanowires (AgNWs) is used as a top/bottom electrode material, and a PDMS dielectric layer with micro-array structure is used to ensure high sensitivity of the pressure sensor. As a result, compared with conventional parallel board capacitive sensors, such sensors exhibit good performance, high sensitivity (2.04 kPa(-1)) in low pressure ranges (0-2000 Pa), low detection limits (7 Pa) and fast response times (100 ms). Furthermore, the integration of the sensor electrode and the dielectric layer ensures good bending stability and cycling stability of the sensor. Flexible capacitive pressure sensors can be used to measure the pressure distribution of finger tips when holding an object and grabbed with fingers. The spatial distribution of the applied pressure can also be clearly identified by fabricating a pressure sensor array. Due to its outstanding performance, the flexible pressure sensor shows bright application prospects in wearable sensing devices, electronic skins and humanoid robotics.
机译：已经提出了一种具有高灵敏度的柔性压力传感器，其包括通过将多二甲基硅氧烷（PDMS）衬底与微量排列的PDMS介电层与典型的夹心结构组成。用银纳米线（AgNW）涂覆的PDMS柔性基板用作顶/底电极材料，并且使用具有微阵列结构的PDMS介电层来确保压力传感器的高灵敏度。结果，与传统的平行板电容传感器相比，这种传感器在低压范围（0-2000Pa）中具有良好的性能，高灵敏度（2.04kPa（-1）），低检测限值（＆lt 7 pa）和快速响应时间（＆ 100 ms）。此外，传感器电极和介电层的积分确保了传感器的良好弯曲稳定性和循环稳定性。柔性电容式压力传感器可用于在握住物体并用手指抓住时测量手指尖端的压力分布。也可以通过制造压力传感器阵列清楚地识别施加的压力的空间分布。由于其出色的性能，柔性压力传感器在可穿戴传感设备，电子皮肤和人形机器人中显示出明亮的应用前景。

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