Time-Of-Flight ERDA for Depth Profiling of Light Elements

Keisuke Yasuda

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Time-Of-Flight ERDA for Depth Profiling of Light Elements

机译：飞行时间ERDA用于轻质元素的深度分析

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The time-of-flight elastic recoil detection analysis (TOF-ERDA) method is one of the ion beam analysis methods that is capable of analyzing light elements in a sample with excellent depth resolution. In this method, simultaneous measurements of recoil ion energy and time of flight are performed, and ion mass is evaluated. The energy of recoil ions is calculated from TOF, which gives better energy resolution than conventional Silicon semiconductor detectors (SSDs). TOF-ERDA is expected to be particularly applicable for the analysis of light elements in thin films. In this review, the principle of TOF-ERDA measurement and details of the measurement equipment along with the performance of the instrumentation, including depth resolution and measurement sensitivity, are described. Examples of TOF-ERDA analysis are presented with a focus on the results obtained from the measurement system developed by the author.

机译：飞行时间弹性反冲检测分析（TOF-ERDA）方法是离子束分析方法之一，能够以优异的深度分辨出样品中的光元素。在该方法中，进行反冲离子能量和飞行时间的同时测量，并评估离子质量。从TOF计算弧形离子的能量，这提供比传统硅半导体检测器（SSD）更好的能量分辨率。预计TOF-ERDA将特别适用于分析薄膜中的轻质元素。在本文中，描述了TOF-ERDA测量的原理和测量设备的细节以及仪器性能，包括深度分辨率和测量灵敏度。 TOF-ERDA分析的实例以专注于由作者开发的测量系统获得的结果。

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《Quantum Beam Science》 |2020年第4期|共15页
作者
Keisuke Yasuda;
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中图分类物理学;
关键词
TOF-ERDAERDAlight elementsdepth profiling;

机译：TOF-ERDAERDALIGHT ElementsDepth分析;

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专利

1. ERDA of Light Elements in Thin Films [J] . 中国原子能科学研究院年报：英文版 . 2002,第000期
2. High Resolution Depth Profiling of Elements Withthe Q3D Magnetic Spectrometer [J] . 中国原子能科学研究院年报：英文版 . 1997,第000期
3. K-nearest neighborhood based integration of time-of-flight cameras and passive stereo for high-accuracy depth maps [J] . Li-wei LIU, Yang LI, Ming ZHANG, 浙江大学学报（英文版）（C辑：计算机与电子） . 2014,第003期
4. Ultra-high performance liquid chromatography/ion mobility-quadrupole time-of-flight mass spectrometry and database-driven automatic peak annotation for the rapid profiling and characterization of the multicomponents from stephaniae tetrandrae radix [J] . Yue‑Xin Qian, Hu‑Min Xie, Tian‑Tian Zuo, 世界中医药杂志（英文版） . 2021,第001期
5. Time-Of-Flight ERDA for Depth Profiling of Light Elements [J] . Keisuke Yasuda Quantum Beam Science . 2020,第4期

机译：飞行时间ERDA用于光源深度分析
6. Depth profiling of light elements in PAMBE-grown GaN and helium-implanted titanium with heavy ion time-of-flight elastic recoil detection [J] . Markwitz A, Kennedy VJ, Durbin SM, Surface and Interface Analysis: SIA: An International Journal Devoted to the Development and Application of Techniques for the Analysis of Surfaces, Interfaces and Thin Films . 2004,第4期

机译：带有重离子飞行时间弹性反冲检测的PAMBE生长的GaN和氦气注入的钛中轻元素的深度轮廓
7. Advancement of light-element neutron depth profiling at the University of Texas [J] . S. M. Whitney, R. G. Downing, S. Biegalski, Journal of Radioanalytical and Nuclear Chemistry . 2008,第1期

机译：德克萨斯大学轻元素中子深度分析的进展
8. CHARARACTERIZATION OF THIN LAYERS BY HEAVY-ION-ERDA (ELASTIC RECOIL DETECTION ANALYSIS) - A TOOL FOR ELEMENT DEPTH PROFILING IN THE PPM RANGE [C] . W. Bohne, S. Lindner, J. Roehrich, Annual international conference on composites engineering . 2002

机译：重离子ERDA（弹性反冲检测分析）对薄层的表征 - PPM系列中元素深度分析的工具
9. Comparing the performance of structured light depth sensors and traditional time-of-flight depth sensors for use in a lunar mining environment. [D] . Hall, Christopher. 2014

机译：比较结构化光深度传感器和传统的飞行时间深度传感器在月球采矿环境中的性能。
10. Surface analysis and depth profiling using time-of-flight elastic recoil detection analysis with argon sputtering [O] . Zdravko Siketić, Iva Bogdanović Radović, Ivan Sudić, -1

机译：使用飞行时间弹性反冲检测分析和氩气溅射进行表面分析和深度分析
11. The new Heavy Ion ERDA set up at iThemba LABS Gauteng : multilayer thin film depth profiling using direct calculation and Monte Carlo simulation codes [O] . Msimanga, M., Wamwangi, D., Comrie, C.M., 2013

机译：在iThemba LaBs Gauteng设置的新型重离子ERDa：使用直接计算和蒙特卡罗模拟代码的多层薄膜深度剖析
12. H(T,N) exp 3 He Reaction for Depth Profiling of Hydrogen by Neutron Time-of-Flight [R] . Davis, J. C., Lefevre, H. W., Poppe, C. H., 1977

机译：H（T，N）exp 3 He通过中子飞行时间对氢进行深度剖析的反应

Time-Of-Flight ERDA for Depth Profiling of Light Elements

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