Study of binary thermal diffusion in a cold wall CVD reactor

H. Chehouani; A. Belghit; B. Claudet

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Study of binary thermal diffusion in a cold wall CVD reactor

机译：冷壁CVD反应器中二元热扩散的研究

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In cold wall CVD reactors, large temperature gradients are present in the vicinity of the hot substrate as a result of natural convection effects. Hence, the gas species in an initially homogeneous gas mixture could be separated under the influence of the thermal diffusion (Sore effect) which is as important as the species molar masses are different. A mathematical model witch includes the coupled Navier-Stokes, heat and mass transfer equations has been developed to carry out and evaluate the importance of the thermal diffusion in the reactor.

机译：在冷壁CVD反应器中，由于自然对流效应，在热基板附近存在较大的温度梯度。因此，可以在热扩散（Sore效应）的影响下分离出最初均质的气体混合物中的气体，这与物质的摩尔质量不同同样重要。数学模型包括耦合的Navier-Stokes，已开发了传热和传质方程，以执行和评估反应堆中热扩散的重要性。

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来源
《Entropie》 |1999年第216期|p.14-21|共8页
作者
H. Chehouani; A. Belghit; B. Claudet;
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原文格式 PDF
正文语种 fre
中图分类热力工程、热机;
关键词
chemical engineering; thermodynamics; binary thermal diffusion;

机译：化学工程;热力学二元热扩散;

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1. Heat Transfer and Thermal Diffusion Phenomena in a Horizontal Cold-Wall CVD Reactor [J] . Ken-ichirou Tanoue, Tsuneyuki Sato, Nobuyuki Imaishi Heat transfer . 1995,第8期

机译：卧式冷壁CVD反应器中的传热和热扩散现象
2. Numerical study of SiC CVD in a vertical cold-wall reactor [J] . A. N. Vorobev, S. Yu. Karpov, M. V. Bogdanov, Computational Materials Science . 2002,第4期

机译：立式冷壁反应堆中SiC CVD的数值研究
3. Toward fast growth of large area high quality graphene using a cold-wall CVD reactor [J] . Alnuaimi Aaesha, Almansouri Ibraheem, Saadat Irfan, RSC Advances . 2017,第82期

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4. Numerical Study of Heating Structure in Cold-Wall MOCVD Reactor by Induction Heating [C] . Lili Zhao, Zhiming Li, Jincheng Zhang International Symposium on Application of Materials Science and Energy Materials . 2019

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5. A kinetic study of benzene hydrogenation on nonuniform nickel catalysts in an isothermal single pellet diffusion reactor [D] . Au, Shirley S. 1992

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6. Synthesis of Multi-Walled Carbon Nanotubes from Plastic Waste Using a Stainless-Steel CVD Reactor as Catalyst [O] . Pranav K. Tripathi, Shane Durbach, Neil J. Coville 2017

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7. Heat Transfer and Thermal Diffusion Phenomena in a Horizontal Cold-Wall CVD Reactor. [O] . Ken-ichirou Tanoue, Tsuneyuki Sato, Nobuyuki Imaishi 1996

机译：水平冷壁CVD反应器中的传热和热扩散现象。
8. Cold source moderator vessel development for the High Flux Isotope Reactor: Thermal-hydraulic studies [R] . Williams, P. T. , Lucas, A. T. , Wendel, M. W. 1998

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Study of binary thermal diffusion in a cold wall CVD reactor

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