Alignment and Fixing of Fiber Optics Based on Electrothermal MEMS Actuators

A. Unamuno; D. Uttamchandani

首页> 外文期刊>IEEE Photonics Technology Letters >Alignment and Fixing of Fiber Optics Based on Electrothermal MEMS Actuators

【24h】

Alignment and Fixing of Fiber Optics Based on Electrothermal MEMS Actuators

机译：基于电热MEMS驱动器的光纤对准与固定

获取原文

获取原文并翻译 | 示例

掌桥外文数据库（机构版） >>

开具论文收录证明 >>

文献代查 >>

页面导航

摘要
著录项
相似文献
相关主题

摘要

An aligning and fixing method for fiber optics is described in this letter. The alignment is performed using a chevrontype thermal microactuator while the fixing is achieved by ultraviolet curing of an epoxy adhesive once the op0tical fibers are aligned. The microactuator has been extended so that the heaters and the optical adhesive are separated to avoid curing of the adhesive by temperature. A prototype has been fabricated using 80-(mu)m-thick metallized silicon-on-insulator and mechanical and optical results from the alignment of two bare single-mode optical fibers before, during, and after the fixing are presented.

机译：在这封信中描述了光纤的对准和固定方法。使用人字形热微致动器进行对准，而一旦对准光学纤维，则通过环氧粘合剂的紫外线固化来实现固定。微致动器已经被扩展，使得加热器和光学粘合剂分开，以避免粘合剂因温度而固化。已经使用厚度为80μm的金属化绝缘体上的硅制作了一个原型，并给出了固定前，固定中和固定后两个裸露的单模光纤对准的机械和光学结果。

著录项

来源
《IEEE Photonics Technology Letters》 |2005年第4期|p.816-818|共3页
作者
A. Unamuno; D. Uttamchandani;
展开▼
作者单位

Department of Electronic and Electrical Engineering. Microsystems Group, University of Strathclyde, Glasgow G1 1XW, Scotland, U.K.;

展开▼
收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种 eng
中图分类光电子技术、激光技术;
关键词
Microactuator; microelectromechanical systems (MEMS); microelectromechanical systems (MEMS) assembly; microelectromechanical systems (MEMS) packaging; microoptoelectromechanical systems;

机译：微致动器;微机电系统（MEMS）;微机电系统（MEMS）组件;微机电系统（MEMS）封装;微光电系统;

相似文献

外文文献
中文文献
专利

1. A non-resonant fiber scanner based on an electrothermally-actuated MEMS stage [J] . Zhang Xiaoyang, Duan Can, Liu Lin, Sensors and Actuators, A. Physical . 2015,第Null期

机译：基于电热驱动MEMS平台的非谐振光纤扫描仪
2. Ultralow-voltage electrothermal MEMS based fiber-optic scanning probe for forward-viewing endoscopic OCT [J] . Park Hyeon-Cheol, Zhang Xiaoyang, Yuan Wu, Optics Letters . 2019,第9期

机译：基于Ultralow-电压电热的基于光纤扫描探针，用于前进的内窥镜OCT
3. Scalable electrothermal MEMS actuator for optical fibre alignment [J] . Syms RRA, Zou H, Yao J, Journal of Micromechanics and Microengineering . 2004,第12期

机译：用于光纤对准的可扩展电热MEMS执行器
4. Fiber-optic confocal microscope with an electrothermally-actuated, large-tunable-range microlens scanner for depth scanning [C] . Lin Liu, Lei Wu, Zory P., Micro Electro Mechanical Systems (MEMS), 2010 . 2010

机译：光纤共焦显微镜，具有电热驱动的大范围微透镜扫描仪，可进行深度扫描
5. Nanometal particle reagents for sensitive, MEMS based fiber-optic, multi-analyte, immuno-biosensing. [D] . Hong, Bin. 2006

机译：纳米金属微粒试剂，用于基于MEMS的灵敏光纤，多种分析物，免疫生物传感。
6. A non-resonant fiber scanner based on an electrothermally-actuated MEMS stage [O] . Xiaoyang Zhang, Can Duan, Lin Liu, -1

机译：基于电热驱动MEMS平台的非谐振光纤扫描仪
7. A non-resonant fiber scanner based on an electrothermally-actuated MEMS stage [O] . Department of Electrical & Computer Engineering, University of Florida, Gainesville, FL 32611, United States ( host institution ), Zhang, Xiaoyang ( UF author ), Duan, Can ( UF author ), 2015

机译：基于电热驱动MEMS平台的非谐振光纤扫描仪
8. PolyMEMS Actuator: A Polymer-Based Microelectromechanical (MEMS) actuator with Macroscopic Action [R] . Horning, R. 2002

机译：polymEms执行器：基于聚合物的微机电（mEms）执行器，具有宏观作用

Alignment and Fixing of Fiber Optics Based on Electrothermal MEMS Actuators

摘要

著录项

相似文献

相关主题

期刊订阅