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首页> 外文期刊>Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on >Drive-level dependence of doubly rotated langasite resonators with different configurations
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Drive-level dependence of doubly rotated langasite resonators with different configurations

机译：具有不同配置的双旋转硅钛矿谐振器的驱动水平依赖性

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摘要

The miniaturization of crystal resonators and filters toward the micro electromechanical systems (MEMS) and nano-structured scales demands improvement of nonlinear piezoelectricity theory and a better understanding of the nonlinear behavior of new crystal materials. The nonlinearities affect the quality factor and acoustic behavior of MEMS and nano-structured resonators and filters. Among these nonlinear effects, drive-level dependence (DLD), which describes the instability of the resonator frequency resulting from voltage level and/or power density, is a potentially significant problem for miniaturized resonators. Langasite, a promising new piezoelectric material, is of current interest for a variety of applications because of its good temperature behavior, good piezoelectric coupling, low acoustic loss, and high Q-factor. It has been recently used to make high-temperature MEMS. In this paper, we report experimental measurements of the DLD of langasite resonators with different resonator configurations (plano-plano, single bevel, and double bevel). The results show that the resonator configuration affects the DLD of the langasite resonator. The DLD measurement results for langasite are compared with literature values for quartz, langaniste, and langatate, and with additional new measurements for a GaPO4 resonator of type R-30 (??11.1?? rotated Y-cut). Uncertainty analysis for the measured drive-level sensitivity is performed as well.
机译：朝着微机电系统（MEMS）和纳米结构尺度的晶体谐振器和滤波器的小型化要求改进非线性压电理论，并更好地理解新型晶体材料的非线性行为。非线性影响MEMS和纳米结构谐振器和滤波器的品质因数和声学性能。在这些非线性效应中，驱动电平相关性（DLD）对于小型谐振器而言可能是一个潜在的重大问题，它描述了由电压电平和/或功率密度引起的谐振器频率的不稳定性。 Langasite是一种有前途的新型压电材料，由于其良好的温度性能，良好的压电耦合，低声损耗和高Q系数，目前在各种应用中受到关注。最近已被用于制造高温MEMS。在本文中，我们报告了具有不同谐振器配置（平面-平面，单斜角和双斜角）的硅酸铜谐振器DLD的实验测量结果。结果表明，谐振器的配置影响了硅酸镧铁矿谐振器的DLD。将蓝铁矿的DLD测量结果与石英，蓝铁矿和蓝铁酸盐的文献数据进行比较，并与R-30型GaPO4谐振器（“ 11.1”旋转Y型切口）的其他新测量结果进行比较。还对测量的驱动水平灵敏度进行不确定性分析。

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