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FEM/BEM for Simulation of LSAW Devices

机译:用于模拟LSAW设备的FEM / BEM

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摘要

This paper presents a modeling of the propagation of surface acoustic, leaky acoustic, and surface skimming bulk waves in piezoelectrics with a finite array of metallic electrodes over their surface. A combined method of matrix Green's function and the finite element method for computation of all acoustic wave fields is an effective tool for simulation of the propagation of acoustic waves in such structures. The proposed method is optimized in the speed of computation of all matrix Green's function components originally obtained. The Fourier transformations of Green's function from k-space domain to real space domain are performed by combined trapezoidal and Filon's integration methods for rapidly oscillating functions. The trapezoidal integration method is used on a distance from a point source from zero to a few wavelengths long, but the other has the advantage for a distance from some wavelength to infinity. That allows one, by selectively condensing computation grids around branch and singular points of the sharp behavior of Green's function, to maximize speed and accuracy of computation of integrals. FEM is used, modified originally to achieve acceleration without loss accuracy. Because of the simple geometry of the electrodes, unknown elastic fields are presented as a series of known eigenfunctions with unknown coefficients over the whole region of electrodes. All unknown coefficients are determined by applying the Galerkin method. There is good agreement between numerical and experimental conductances of acoustic wave transducers on materials such as lithium niobate and lithium tantalate.
机译:本文提出了在表面具有有限阵列金属电极的压电材料中,表面声波,泄漏声波和表面掠过体波的传播模型。矩阵格林函数和有限元法相结合的方法用于计算所有声波场,是一种有效的工具,可以模拟声波在此类结构中的传播。该方法在最初获得的所有矩阵格林函数分量的计算速度上得到了优化。格林函数从k空间域到实空间域的傅立叶变换是通过结合梯形和菲隆积分方法来实现的,这些函数用于快速振荡函数。梯形积分法用于从点光源到零到几个波长的距离,但是另一种方法具有从某个波长到无限远的距离的优点。通过选择性地压缩格林函数的尖锐行为的分支和奇异点周围的计算网格,可以最大程度地提高积分计算的速度和准确性。使用FEM,最初对其进行了修改,以实现无损失精度的加速。由于电极的简单几何形状,未知的弹性场表示为一系列已知的本征函数,在电极的整个区域上具有未知的系数。所有未知系数均通过应用Galerkin方法确定。在诸如铌酸锂和钽酸锂之类的材料上,声波换能器的数值电导与实验电导之间有很好的一致性。

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