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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >Finite element modeling and experimental characterization of crosstalk in 1-D CMUT arrays
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Finite element modeling and experimental characterization of crosstalk in 1-D CMUT arrays

机译：一维CMUT阵列中串扰的有限元建模和实验表征

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摘要

Crosstalk is the coupling of energy between the elements of an ultrasonic transducer array. This coupling degrades the performance of transducers in applications such as medical imaging and therapeutics. In this paper, we present an experimental demonstration of guided interface waves in capacitive micromachined ultrasonic transducers (CMUTs). We compare the experimental results to finite element calculations using a commercial package (LS-DYNA) for a 1-D CMUT array operating in the conventional and collapsed modes. An element in the middle of the array was excited with a unipolar voltage pulse, and the displacements were measured using a laser interferometer along the center line of the array elements immersed in soybean oil. We repeated the measurements for an identical CMUT array covered with a 4.5-mum polydimethyl-siloxane (PDMS) layer. The main crosstalk mechanism is the dispersive guided modes propagating in the fluid-solid interface. Although the transmitter element had a center frequency of 5.8 MHz with a 130% fractional bandwidth in the conventional operation, the dispersive guided mode was observed with the maximum amplitude at a frequency of 2.1 MHz, and had a cut-off frequency of 4 MHz. In the collapsed operation, the dispersive guided mode was observed with the maximum amplitude at a frequency of 4.0 MHz, and had a cut-off frequency of 10 MHz. Crosstalk level was lower in the collapsed operation (-39 dB) than in the conventional operation (-24.4 dB). The coverage of the PDMS did not significantly affect the crosstalk level, but reduced the phase velocity for both operation modes. Lamb wave modes, A0 and S0, were also observed with crosstalk levels of -40 dB and -65 dB, respectively. We observed excellent agreement between the finite element and the experimental results
机译：串扰是超声换能器阵列的元件之间的能量耦合。这种耦合降低了换能器在医学成像和治疗等应用中的性能。在本文中，我们介绍了电容微加工超声换能器（CMUT）中的导引界面波的实验演示。我们将实验结果与使用商业软件包（LS-DYNA）的一维CMUT阵列在常规模式和折叠模式下进行的有限元计算进行比较。用单极电压脉冲激励阵列中间的元件，并使用激光干涉仪沿着浸入大豆油中的阵列元件的中心线测量位移。我们对覆盖有4.5微米聚二甲基硅氧烷（PDMS）层的相同CMUT阵列重复了测量。主要的串扰机制是在流固界面传播的色散导模。尽管在常规操作中，发射器元件的中心频率为5.8 MHz，分数带宽为130％，但在频率为2.1 MHz时观察到最大振幅的色散导模，其截止频率为4 MHz。在折叠操作中，在频率为4.0 MHz时观察到最大振幅的色散引导模式，其截止频率为10 MHz。崩溃操作（-39 dB）的串扰水平低于常规操作（-24.4 dB）。 PDMS的覆盖范围并未显着影响串扰水平，但降低了两种工作模式的相速度。还观察到兰伯波模式A0和S0，串扰水平分别为-40 dB和-65 dB。我们观察到有限元与实验结果之间的出色一致性

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