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首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >Simulation of characteristics of a LiNbO3/diamond surface acoustic wave
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Simulation of characteristics of a LiNbO3/diamond surface acoustic wave

机译：LiNbO3 /金刚石表面声波特性的模拟

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High-frequency surface acoustic wave (SAW) devices based on diamond that have been produced to date utilize the SiO2/ZnO/diamond structure, which shows excellent characteristics of a phase velocity of over 10,000 m/s with a zero temperature coefficient; this structure has been successfully applied to high-frequency narrowband filters and resonators. To expand material systems to wideband applications, c-axis-oriented LiNbO3 on diamond was studied and a coupling coefficient up to 9.0% was estimated to be obtained. In this paper, the characteristics of LiNbO3/diamond with the assumption that the LiNbO3 film is a single crystal have been studied by theoretical calculations to find higher coupling coefficient conditions. Calculations are made for the phase velocity, the coupling coefficient, and the temperature coefficient of the Rayleigh wave and its higher mode Sezawa waves. As a result, LiNbO3/diamond is found to offer a very high electromechanical coupling coefficient of up to 16% in conjunction with a high phase velocity of 12,600 m/s and a small temperature coefficient of 25 ppm/deg. This characteristic is suitable for wide bandwidth applications in high-frequency SAW devices.
机译：迄今为止，基于金刚石的高频表面声波（SAW）器件采用SiO2 / ZnO /金刚石结构，该结构显示出相速度超过10,000 m / s且温度系数为零的出色特性；这种结构已经成功地应用于高频窄带滤波器和谐振器。为了将材料系统扩展到宽带应用，对金刚石上c轴取向的LiNbO3进行了研究，估计耦合系数高达9.0％。本文通过理论计算研究了以LiNbO3膜为单晶为前提的LiNbO3 /金刚石的特性，以找到更高的耦合系数条件。计算了瑞利波及其更高模式的Sezawa波的相速度，耦合系数和温度系数。结果，发现LiNbO3 /金刚石具有高达16％的非常高的机电耦合系数，以及12,600 m / s的高相速度和25 ppm / deg的小温度系数。该特性适用于高频声表面波设备中的宽带应用。

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