首页> 外文期刊>IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control >Surface acoustic wave reflection from diamond-like carbon thin filmreflecting arrays on LiNbO3 substrates
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Surface acoustic wave reflection from diamond-like carbon thin filmreflecting arrays on LiNbO3 substrates

机译:LiNbO3衬底上类金刚石碳薄膜反射阵列的表面声波反射

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摘要

Surface acoustic wave (SAW) reflection from diamond-like carbonn(DLC) strip reflecting arrays on Y-Z LiNbO3 is investigated.nThe reflection from DLC strips with triangular cross section has beennobserved. Reflection increases in alternating DLC and Al strips inn90° reflecting arrays in comparison with pure Al structures. Thenvalues of reflection coefficient per period in the slanted reflectingnarrays are estimated to be about 1.0% for pure DLC strips (height tonwavelength ratio equal to 0.02), 2% for uniform Al coating on DLCnreflecting arrays, and 3.5% for alternating DLC and Al strips. Thisnvalue is higher than that for pure Al strips by about 0.7%. Reflectionnproperties are briefly discussed, and preparation technique is presented
机译:研究了Y-Z LiNbO3上类金刚石碳带反射阵列的表面声波(SAW)反射。n三角形截面的DLC带的反射未被观察到。与纯Al结构相比,在90°反射阵列中交替DLC和Al条带的反射增加。然后,对于纯DLC条带(高吨波长比等于0.02),倾斜反射阵列中每个周期的反射系数值估计约为1.0%,对于DLCn反射阵列上均匀的Al涂层,该值约为2%,对于交替DLC和Al条带,其值为3.5%。该值比纯铝带的值高约0.7%。简要讨论了Reflectionnproperties,并介绍了准备技术

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