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Analysis of general multi-channel planar waveguides

机译：通用多通道平面波导的分析

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摘要

Using the planar waveguide concept in surface acoustic wave (SAW) technology is often advantageous when the modeling of transversely distributed phenomena is indispensable for an accurate design of SAW devices. This is especially true when complex multi-track structures such as transversely coupled resonator filters (TCRFs) are under consideration where, e.g., transverse velocity and stiffness profiles have to be incorporated in the device simulation. The interdigital transducers (IDTs) and the reflector gratings composing those devices behave as planar waveguides, supporting, in principle, all kinds of modes such as bound, semi-bound, and radiation modes. Therefore, to model these SAW propagation effects, we subdivide the SAW structures in transverse direction into several parallel waveguiding channels (N regions), and take, as the wave-describing quantity, a two-dimensional scalar potential function. By doing so, we obtain a complete set of orthonormal modes into which an arbitrary transverse excitation function can be expanded to study its propagation. The general mode spectrum includes a discrete spectrum of bound modes and continuous spectra of semi-bound and radiation modes. We calculate all types of modes by making use of the stack matrix technique. The present work, which arose from the requirement of creating an efficient mathematical tool for the simulation of TCRFs, provides the complete analysis of general SAW multi-channel structures.
机译：当横向分布现象的建模对于SAW器件的精确设计必不可少时，在表面声波（SAW）技术中使用平面波导概念通常是有利的。当考虑诸如横向耦合谐振器滤波器（TCRF）之类的复杂多迹线结构时，尤其如此，例如在设备仿真中必须结合横向速度和刚度曲线。组成这些设备的叉指式换能器（IDT）和反射器光栅起平面波导的作用，原则上支持各种模式，例如束缚，半束缚和辐射模式。因此，为了模拟这些声表面波传播效应，我们将声表面波结构沿横向细分为几个平行的波导通道（N个区域），并以二维标量势函数作为波描述量。通过这样做，我们获得了一套完整的正交模式，可以将任意横向激励函数扩展为一组正交模式，以研究其传播。普通模式光谱包括束缚模式的离散光谱以及半束缚和辐射模式的连续光谱。我们利用堆栈矩阵技术计算所有类型的模式。本工作源于为TCRF的仿真创建有效的数学工具的要求，从而提供了对一般SAW多通道结构的完整分析。

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