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Broadband ultrasonic transducers using a LiNbO/sub 3/ plate with a ferroelectric inversion layer

机译:使用具有铁电反型层的LiNbO / sub 3 /板的宽带超声换能器

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摘要

Some heat treatment of a lithium niobate (LiNbO/sub 3/) plate induces domain inversion, thereby yielding a ferroelectric inversion layer. In such a piezoelectric plate with an inversion layer, even-order thickness-extensional modes, as well as odd-order modes, can be excited piezoelectrically. Therefore, the ultrasonic transducer using such a piezoelectric plate is expected to operate over a wide frequency range. In this paper, it is shown that broadband ultrasonic transducers can be obtained at a certain thickness ratio of inversion layer to plate, and that the transducer characteristics differ depending on whether the inversion layer is on the front side or on the backside. The broadband characteristics are experimentally demonstrated by fabricating transducers with 9 MHz or 75 MHz center frequency using 36/spl deg/ rotated Y-cut LiNbO/sub 3/ plates with a ferroelectric inversion layer.
机译:铌酸锂(LiNbO / sub 3 /)板的某些热处理会引起畴反转,从而产生铁电反转层。在这种具有反转层的压电板中,可以压电地激发偶数阶的厚度-延伸模式以及奇数阶的模式。因此,期望使用这种压电板的超声波换能器在较宽的频率范围内工作。在本文中,示出了可以以一定的倒置层与板的厚度比获得宽带超声换能器,并且换能器特性取决于倒置层是在正面还是背面上而不同。通过使用具有铁电反型层的36 / spl deg /旋转Y形LiNbO / sub 3 /板制造中心频率为9 MHz或75 MHz的换能器,实验证明了宽带特性。

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