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首页> 外文期刊>IEEE Transactions on Industrial Electronics >Optimal Design, Fabrication, and Control of an $XY$ Micropositioning Stage Driven by Electromagnetic Actuators
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Optimal Design, Fabrication, and Control of an $XY$ Micropositioning Stage Driven by Electromagnetic Actuators

机译：电磁执行器驱动的$ XY $微定位平台的最佳设计，制造和控制

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摘要

This paper presents the optimal design, fabrication, and control of a novel compliant flexure-based totally decoupled $XY$ micropositioning stage driven by electromagnetic actuators. The stage is constructed with a simple structure by employing double four-bar parallelogram flexures and four noncontact types of electromagnetic actuators to realize the kinematic decoupling and force decoupling, respectively. The kinematics and dynamics modeling of the stage are conducted by resorting to compliance and stiffness analysis based on matrix method, and the parameters are obtained by multiobjective genetic algorithm (GA) optimization method. The analytical models for electromagnetic forces are also established, and both mechanical structure and electromagnetic models are validated by finite-element analysis via ANSYS software. It is found that the system is with hysteresis and nonlinear characteristics when a preliminary open-loop test is conducted; thereafter, a simple PID controller is applied. Therefore, an inverse Preisach model-based feedforward sliding-mode controller is exploited to control the micromanipulator system. Experiments show that the moving range can achieve 1 mm $times$ 1 mm and the resolution can reach $pm 0.4 muhbox{m}$. Moreover, the designed micromanipulator can bear a heavy load because of its optimal mechanical structure.
机译：本文介绍了一种新颖的，基于挠性的，完全基于挠性的完全去耦的 $ XY $ 的最佳设计，制造和控制。通过电磁执行器。通过使用双四杆平行四边形挠曲和四种非接触式电磁执行器分别实现运动学解耦和力解耦，以简单的结构构造平台。通过基于矩阵法的柔度和刚度分析，进行平台的运动学和动力学建模，并通过多目标遗传算法（GA）优化方法获得参数。建立了电磁力的分析模型，并通过ANSYS软件进行了有限元分析，从而验证了机械结构和电磁模型。通过初步的开环试验，发现该系统具有滞后特性和非线性特性。此后，将应用简单的PID控制器。因此，基于Preisach逆模型的前馈滑模控制器被用来控制微操纵器系统。实验表明，移动范围可以达到1 mm <公式 $ times $ 1 mm，分辨率可以达到 $ pm 0.4 muhbox {m} $ 。而且，设计的微操纵器由于其最佳的机械结构而可以承受重的负载。

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