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Transient microscale flow boiling heat transfer characteristics of HFE-7000

机译:HFE-7000的瞬时微尺度沸腾传热特性

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摘要

A detailed experimental study was conducted to identify the important parametric trends governing the temperature response of a microdevice to transient heat loads for flow boiling of HFE-7000. The microde-vice consisted of a microgap etched on a silicon wafer and placed centrally over a thin-film heater deposited on a Pyrex wafer. A step change in heat flux and a rectangular pulse were applied to the heater. The effects of mass flux, heat flux (pulse amplitude), and pulse width on the heater temperature response and boiling dynamics were investigated in detail. Conditions at which onset of boiling occurred were identified and the repeatability of the boiling process was studied. Onset of boiling and the subsequent bubble dynamics was recorded with a high-speed video camera. Boiling initiated at very high wall superheat due to the smoothness of the heater surface and low surface tension of HFE-7000. At high heat fluxes, onset of boiling resulted in the formation of a vapor film on the surface and rapid heater temperature rise was observed. Time taken to initiate boiling decreased rapidly with increasing heat flux and then reached a constant value. The wall superheat at which boiling started increased with increasing heat flux and subsequently reached a constant limit.
机译:进行了详细的实验研究,以确定控制微型设备对HFE-7000流动沸腾的瞬态热负荷的温度响应的重要参数趋势。微设备由微间隙组成,该微间隙被蚀刻在硅晶片上,并被放置在沉积在派热克斯晶片上的薄膜加热器的中央。向加热器施加热通量的阶跃变化和矩形脉冲。详细研究了质量通量,热通量(脉冲幅度)和脉冲宽度对加热器温度响应和沸腾动力学的影响。确定发生沸腾的条件,并研究沸腾过程的可重复性。用高速摄像机记录了沸腾的开始以及随后的气泡动力学。由于加热器表面的光滑度和HFE-7000的低表面张力,在很高的壁过热条件下开始沸腾。在高热通量下,沸腾的开始导致在表面上形成蒸汽膜,并且观察到加热器温度迅速升高。随着热通量的增加,开始沸腾所需的时间迅速减少,然后达到恒定值。开始沸腾的壁过热随着热通量的增加而增加,并随后达到恒定极限。

著录项

  • 来源
    《International Journal of Heat and Mass Transfer》 |2015年第11期|396-405|共10页
  • 作者单位

    Dielectric Systems Module, Applied Materials, Santa Clara, CA 95054, United States;

    Department of Mechanical, Aerospace, and Nuclear Engineering, Rensselaer Polytechnic Institute, Troy, NY 12180, United States;

    Department of Mechanical and Aerospace Engineering, University of Central Florida, Orlando, FL 32816, United States;

    Department of Mechanical, Aerospace, and Nuclear Engineering, Rensselaer Polytechnic Institute, Troy, NY 12180, United States;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Microscale; Flow boiling; Transient; HFE-7000;

    机译:微量;流沸腾;短暂的;HFE-7000;

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