...
  • 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Japanese journal of applied physics >A New Methodology for Probing the Electrical Properties of Heavily Phosphorous-Doped Polycrystalline Silicon Nanowires
【24h】

A New Methodology for Probing the Electrical Properties of Heavily Phosphorous-Doped Polycrystalline Silicon Nanowires

机译：探索重掺杂多晶硅纳米线电性能的新方法

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

In this study, we proposed a new methodology for probing the electrical properties of heavily doped polycrystalline silicon (poly-Si) nanowires (NWs), including active doping concentration, mobility, and interface fixed charge density. Implementation of this procedure is based on the modulation of the device operation of a gate-all-around (GAA) junctionless (J-less) transistor from the gated resistor mode to the ungated one. The extracted carrier concentration in the NW is found to be much lower than that of Hall measurements, while a negative fixed charge density is identified with the procedure. Dopant segregation at the oxide interface is postulated to be closely related to these observations.
机译：在这项研究中，我们提出了一种用于探测重掺杂多晶硅（poly-Si）纳米线（NWs）的电学特性的新方法，包括活性掺杂浓度，迁移率和界面固定电荷密度。此过程的实现基于对全栅极（GAA）无结（无J）晶体管从门控电阻器模式到非门控晶体管的器件操作的调制。发现在NW中提取的载流子浓度远低于Hall测量的载流子浓度，而通过该程序确定的负固定电荷密度。假定氧化物界面处的掺杂物偏析与这些观察结果密切相关。

著录项

  • 来源
    《Japanese journal of applied physics》 |2013年第4issue2期|04CC18.1-04CC18.6|共6页
  • 作者

    Horng-Chih Lin; Zer-Ming Lin; Tiao-Yuan Huang;

  • 作者单位

    Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University, Hsinchu 300, Taiwan,National Nano Device Laboratories, Hsinchu 300, Taiwan;

    Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University, Hsinchu 300, Taiwan;

    Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University, Hsinchu 300, Taiwan;

  • 收录信息
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号