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Rapid Reversible Degradation of Silicon Thin Films by a Treatment in Water

机译:水中硅薄膜的快速可逆降解

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摘要

Metastability effects in amorphous and microcrystalline silicon thin films induced by exposure to atmospheric gases and water are investigated. A simple procedure is described which allows studying such effects in a reproducible and reliable manner on a short time scale. The method is applied to thin film silicon materials with different structure composition ranging from amorphous to highly crystalline. It is shown that the materials can be brought back into a well defined state even after pro-longed and repeated degradation cycles.
机译:研究了由于暴露于大气和水而在非晶和微晶硅薄膜中引起的亚稳态效应。描述了一种简单的过程,该过程允许在短时间内以可再现和可靠的方式研究此类效应。该方法适用于具有从非晶态到高度结晶性的不同结构组成的薄膜硅材料。结果表明,即使经过长时间和反复的降解循环,材料也可以恢复到良好的状态。

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  • 来源
    《Japanese journal of applied physics》 |2012年第7issue1期|p.070210.1-070210.3|共3页
  • 作者单位

    IEK-5 Photovoltaik, Forschungszentrum Julich, 52425 Julich, Germany,Department of Physics, Mugla University, Kotekli Yerleskesi, 48000 Mugla, Turkey;

    IEK-5 Photovoltaik, Forschungszentrum Julich, 52425 Julich, Germany,Department of Physics, Mugla University, Kotekli Yerleskesi, 48000 Mugla, Turkey;

    IEK-5 Photovoltaik, Forschungszentrum Julich, 52425 Julich, Germany;

    IEK-5 Photovoltaik, Forschungszentrum Julich, 52425 Julich, Germany;

    Department of Physics, Mugla University, Kotekli Yerleskesi, 48000 Mugla, Turkey;

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