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首页> 外文期刊>Japanese journal of applied physics.Part 1.Regular papers & short notes >Mechanism of Oxidation on Si-2Sb-2Te-5 Phase Change Material and Its Application
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Mechanism of Oxidation on Si-2Sb-2Te-5 Phase Change Material and Its Application

机译：Si-2Sb-2Te-5相变材料上的氧化机理及其应用

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摘要

Uniformly oxygen doping into phase change materials (PCMs) will increase their crystallization temperatures, but natural oxidation of PCMs has an opposite effect. Mechanism of oxidation for Si-2Sb-2Te-5 was studied by in situ X-ray photoelectron spectroscopy, employing an oxygen content gradient sample. During an oxidation process, oxygen preferentially reacts with Si due to its smallest electronegativity value among Si, Sb, and Te elements. Models have been proposed for the different mechanisms of oxidation. O-doping into Si-Sb-Te was proposed to prepare nano-crystal PCM based on the discovering. Performance of nano-crystal material and memory device was effectively promoted.
机译：将氧气均匀地掺入相变材料（PCM）中会增加其结晶温度，但是PCM的自然氧化作用却相反。使用氧含量梯度样品，通过原位X射线光电子能谱研究了Si-2Sb-2Te-5的氧化机理。在氧化过程中，由于Si，Sb和Te元素中的负电性最小，因此氧优先与Si反应。已经提出了用于不同氧化机理的模型。基于这一发现，提出了将O掺杂到Si-Sb-Te中制备纳米级PCM的方法。有效提高了纳米晶体材料和存储器件的性能。

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    Ting Zhang; Zhitang Song; Yifeng Gu; Yan Cheng; Bo Liu; Songlin Feng;

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    State Key Laboratory of Functional Materials for Informafics, Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences, Shanghai 200050, China;

    State Key Laboratory of Functional Materials for Informafics, Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences, Shanghai 200050, China;

    State Key Laboratory of Functional Materials for Informafics, Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences, Shanghai 200050, China;

    State Key Laboratory of Functional Materials for Informafics, Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences, Shanghai 200050, China;

    State Key Laboratory of Functional Materials for Informafics, Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences, Shanghai 200050, China;

    State Key Laboratory of Functional Materials for Informafics, Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences, Shanghai 200050, China;

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