...
  • 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Japanese journal of applied physics >Magnetron Sputtering Deposition of Conductive Diamond-Like Carbon Films with Embedded Nanoparticles
【24h】

Magnetron Sputtering Deposition of Conductive Diamond-Like Carbon Films with Embedded Nanoparticles

机译：具有嵌入式纳米粒子的类似金刚石的导电碳膜的磁控溅射沉积

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

We developed a process technology for synthesizing conductive diamond-like carbon (DLC) films, in which nanoparticles embedded in the DLC films played the role of the paths of electric current. The synthesis process consisted of three steps. The first step was the deposition of nanoparticles, which was realized by operating a magnetron sputtering source with pure argon at a pressure of 500 mTorr. The second step was the deposition of a DLC film, which was realized by operating the same magnetron sputtering source with the mixture of argon and hydrogen at a pressure of 5 mTorr. The third step was the removal of the residual DLC film on nanoparticles. This step was realized using a plasma with the mixture of argon and oxygen, which was produced by applying an rf power to the substrate holder of the same magnetron sputtering source. The conductivity of a DLC film with embedded copper nanoparticles was nearly high enough to be the surface coating of separators in polymer electrolyte fuel cells.
机译：我们开发了一种合成导电类金刚石碳（DLC）膜的工艺技术，其中嵌入在DLC膜中的纳米颗粒起着电流路径的作用。合成过程包括三个步骤。第一步是纳米颗粒的沉积，这是通过在500 mTorr的压力下用纯氩气操作磁控溅射源来实现的。第二步是沉积DLC膜，这是通过在5 mTorr的压力下用氩气和氢气的混合物操作相同的磁控溅射源来实现的。第三步是去除纳米颗粒上残留的DLC膜。使用具有氩气和氧气的混合物的等离子体来实现该步骤，该等离子体是通过向同一磁控溅射源的基板支架施加射频功率而产生的。具有嵌入的铜纳米颗粒的DLC膜的电导率几乎足够高，足以成为聚合物电解质燃料电池中隔板的表面涂层。

著录项

  • 来源
    《Japanese journal of applied physics》 |2011年第8issue3期|p.08KE05.1-08KE05.4|共4页
  • 作者

    Koichi Sasaki; Takahiko Tsutsumi; Noriharu Takada;

  • 作者单位

    Division of Quantum Science and Engineering, Faculty of Engineering, Hokkaido University, Sapporo 060-8628, Japan;

    Department of Electrical Engineering and Computer Science, Nagoya University, Nagoya 464-8603, Japan;

    Department of Electrical Engineering and Computer Science, Nagoya University, Nagoya 464-8603, Japan;

  • 收录信息
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号