Gettering in Large-Grained Thin Polycrystalline Silicon Films on Glass Substrate

Akito Hara; Tsutomu Sato

首页> 外文期刊>Japanese journal of applied physics >Gettering in Large-Grained Thin Polycrystalline Silicon Films on Glass Substrate

【24h】

Gettering in Large-Grained Thin Polycrystalline Silicon Films on Glass Substrate

机译：玻璃基板上大晶粒的多晶硅薄膜中的吸气

获取原文

获取原文并翻译 | 示例

掌桥外文数据库（机构版） >>

开具论文收录证明 >>

文献代查 >>

页面导航

摘要
著录项
相似文献
相关主题

摘要

Large-grained polycrystalline silicon (poly-Si) films on a glass substrate are good candidate materials for fabricating poly-Si thin-film transistors (TFTs) and poly-Si solar cells. The gettering of metal impurities in thin poly-Si films is one of the key techniques for realizing high-performance, high-reliability, and high-efficiency TFTs and solar cells. In this study, the gettering of large-grained thin poly-Si films with a thickness of 100 nm containing Ni impurities was studied. A large-grained Ni-doped thin poly-Si film was fabricated on a glass substrate by Ni-induced solid phase crystallization (SPC) followed by cw green laser recrystallization. The grain size of the poly-Si film was 1 × 10μm~2. The behavior of Ni impurities in the large-grained thin poly-Si film was evaluated by scanning transmission electron microscopy (STEM), STEM energy-dispersive X-ray spectroscopy (STEM-EDX), and electron diffraction (ED) analysis. It was observed that Ni was stabilized through the formation of nickel-disilicide (NiSi_2) at the triple junction during low-temperature device fabrication.

机译：玻璃基板上的大晶粒多晶硅（poly-Si）膜是制造多晶硅薄膜晶体管（TFT）和多晶硅太阳能电池的良好候选材料。在多晶硅薄膜中吸收金属杂质是实现高性能，高可靠性和高效率的TFT和太阳能电池的关键技术之一。在这项研究中，研究了含有Ni杂质的厚100nm的大晶粒多晶硅薄膜的吸杂。通过Ni诱导的固相结晶（SPC），然后进行cw绿激光重结晶，在玻璃基板上制备了大颗粒的掺杂Ni的多晶硅薄膜。多晶硅膜的晶粒尺寸为1×10μm〜2。通过扫描透射电子显微镜（STEM），STEM能量色散X射线光谱（STEM-EDX）和电子衍射（ED）分析，评估了大颗粒多晶硅薄膜中Ni杂质的行为。可以看出，在低温器件制造过程中，Ni通过在三重结处形成二硅化镍（NiSi_2）得以稳定。

著录项

来源
《Japanese journal of applied physics》 |2010年第1issue1期|010203.1-010203.2|共2页
作者
Akito Hara; Tsutomu Sato;
展开▼
作者单位

Tohoku Gakuin University, Tagajo, Miyagi 985-8537, Japan;

Tohoku Gakuin University, Tagajo, Miyagi 985-8537, Japan;

展开▼
收录信息
原文格式 PDF
正文语种 eng
中图分类
关键词

相似文献

外文文献
中文文献
专利

1. Fabrication of large-grained thin polycrystalline silicon films on foreign substrates by titanium-assisted metal-induced layer exchange [J] . Antesberger T., Wassner T. A., Kashani M., Journal of Applied Physics . 2012,第12期

机译：钛辅助金属诱导层交换在异质衬底上制备大晶粒多晶硅薄膜
2. Fabrication of large-grained thin polycrystalline silicon films on foreign substrates by titanium-assisted metal-induced layer exchange [J] . T. Antesberger, T. A. Wassner, M. Kashani, Journal of Applied Physics . 2012,第12期

机译：钛辅助金属诱导层交换在异质衬底上制备大晶粒多晶硅薄膜
3. Large-grained polycrystalline silicon on glass for thin-film solar cells [J] . S. Gall, J. Schneider, J. Klein, Thin Solid Films . 2006,第Jul期

机译：薄膜太阳能电池玻璃上的大晶粒多晶硅
4. Lateral large-grained low-temperature polycrystalline silicon-germanium thin-film transistors on glass substrates [C] . Okabe Yasunori, Suzuki Junki, Kitahara Kuninori, 2012 Nineteenth International Workshop on Active-Matrix Flatpanel Displays and Devices : TFT Technologies and FPD Materials . 2012

机译：玻璃基板上的横向大晶粒低温多晶硅锗锗薄膜晶体管
5. Synthesis of large-grained polycrystalline silicon by hot-wire chemical vapor deposition for thin film photovoltaic applications. [D] . Mason, Maribeth Swiatek. 2004

机译：通过热线化学气相沉积法在薄膜光伏应用中合成大晶粒多晶硅。
6. Polycrystalline Silicon ISFETs on Glass Substrate [O] . Feng Yan, Pedro Estrela, Yang Mo, 2005

机译：玻璃基板上的多晶硅ISFET
7. LARGE-GRAINED POLYCRYSTALLINE SILICON ON GLASS FOR THIN-FILM SOLAR CELLS [O] . S. Gall, J. Schneider, J. Klein, 2015

机译：用于薄膜太阳能电池的玻璃上的大颗粒多晶硅
8. Thin Films of Silicon on Metallurgical Silicon Substrates-Phase II. Topical Report No. 3. Stability of Thin Film Polycrystalline Silicon Solar Cells [R] . Chu, T. L. 1978

机译：冶金硅衬底上的硅薄膜 - 阶段II。专题报告第3号。薄膜多晶硅太阳能电池的稳定性

Gettering in Large-Grained Thin Polycrystalline Silicon Films on Glass Substrate

摘要

著录项

相似文献

相关主题

期刊订阅