Improvement in Electrical Properties of Laser Ablated Barium Strontium Titanate Thin Films by Controlled Oxygen Atmosphere

Radhapiyari Laishram; Om Prakash Thakur; Dilip Kumar Bhattacharya; Chandra Prakash

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Improvement in Electrical Properties of Laser Ablated Barium Strontium Titanate Thin Films by Controlled Oxygen Atmosphere

机译：受控氧气氛改善激光烧蚀钛酸锶锶钡薄膜的电性能

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Thin films of Ba_(0.6)Sr_(0.4)Ti_(0.99) Fe_(0.01) O_3 (BST) were deposited on Pt/Si substrates at two different substrate temperatures (650 and 700 ℃) by pulsed laser deposition. The perovskite structure of the films was confirmed by X-ray diffraction (XRD) analysis and atomic force microscopy (AFM) was carried out to observe the surface morphology. The detailed electrical properties such as dielectric constant, loss tangent, tunability and leakage current of the films were investigated in order to determine their suitability for application in microwave tunable devices.

机译：Ba_（0.6）Sr_（0.4）Ti_（0.99）Fe_（0.01）O_3（BST）薄膜通过脉冲激光沉积在两种不同的衬底温度（650和700℃）下沉积在Pt / Si衬底上。通过X射线衍射（XRD）分析确认了膜的钙钛矿结构，并且进行了原子力显微镜（AFM）以观察表面形态。研究了薄膜的详细电性能，如介电常数，损耗角正切，可调性和泄漏电流，以确定它们在微波可调性设备中的适用性。

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来源
《Japanese journal of applied physics》 |2009年第6issue1期|061402.1-061402.4|共4页
作者
Radhapiyari Laishram; Om Prakash Thakur; Dilip Kumar Bhattacharya; Chandra Prakash;
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Solid State Physics Laboratory, Timarpur, Delhi 110054, India;

Solid State Physics Laboratory, Timarpur, Delhi 110054, India;

Solid State Physics Laboratory, Timarpur, Delhi 110054, India;

Defence Research and Development Organization, Head Quarters, New Delhi 110016, India;

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1. Improvement in crystallization and electrical properties of barium strontium titanate thin films by gold doping using metal-organic deposition method [J] . Hong-Wen Wang, Siu-Wei Nien, Kuok-Chuan Lee, Thin Solid Films . 2005,第1a2期

机译：金属有机沉积法掺金改善钛酸钡锶锶薄膜的晶化和电性能
2. Microstructural and Microwave Characterizations of Pulsed Laser Ablated Barium and Strontium Titanate Thin Films [J] . S. LIEBUS, A. BOULLE, F. COSSET Ferroelectrics: Letters Section . 2003,第1期

机译：脉冲激光烧蚀钛酸锶钡钛酸酯薄膜的微结构和微波表征
3. Effect of thermal annealing on the morphology of sol–gel processed barium strontium titanate thin films: Consequences on electrical properties [J] . C. Mansour, M. Benwadih, G. A. Chahine, AIP Advances . 2020,第6期

机译：热退火对钛酸钡锶钡锶锶形态的影响：对电性能的影响
4. Effect of the oxygen partial pressure on the microstructure and properties of barium strontium titanate thin films suynthesized by pulsed laser deposition [C] . C.G.Fountzoulas, C.W.Hubbard, Eric H.Ngo, Symposium on materials issues for tunable RF and microwave devices . 2000

机译：氧气分压对脉冲激光沉积加入钛酸钡薄膜微观结构和性能的影响
5. Studies on Synthesis, Structural and Electrical Properties of Complex Oxide Thin Films: Barium Strontium Titanate and Lanthanum Strontium Nickelate. [D] . Podpirka, Adrian A. 2012

机译：复合氧化物薄膜的合成，结构和电学性质的研究：钛酸锶钡和镍酸镧锶。
6. Optical Properties of Nitrogen-Substituted Strontium Titanate Thin Films Prepared by Pulsed Laser Deposition [O] . Ivan Marozau, Andrey Shkabko, Max Döbeli, 2009

机译：脉冲激光沉积制备的氮取代钛酸锶锶薄膜的光学性质
7. Effect of thermal annealing on the morphology of sol–gel processed barium strontium titanate thin films: Consequences on electrical properties [O] . C. Mansour, M. Benwadih, G. A. Chahine, 2020

机译：热退火对钛酸钡锶钡锶锶形态的影响：对电性能的影响

Improvement in Electrical Properties of Laser Ablated Barium Strontium Titanate Thin Films by Controlled Oxygen Atmosphere

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