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首页> 外文期刊>Japanese journal of applied physics >Elastic Double Structure of Amorphous Carbon Pillar Grown by Focused-Ion-Beam Chemical Vapor Deposition
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Elastic Double Structure of Amorphous Carbon Pillar Grown by Focused-Ion-Beam Chemical Vapor Deposition

机译：聚焦离子束化学气相沉积法生长非晶碳柱的弹性双结构

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摘要

Amorphous carbon pillars grown by focused ion beam induced chemical vapor deposition (FIB-CVD) had been considered to form in a cylindrical double structure. In this structure, the core containing Ga originating from the primary ion is surrounded by an amorphous carbon shell grown by the secondary electrons that were emitted during the inelastic scattering process of the primary ions penetration. We measured the Young's modulus in a series of inclined pillars; the thickness of the pillars was reduced with the inclination. However, the Young's modulus of the inclined pillars of thinner diameter increased. Here, we found that such FIB-CVD pillars had an elastic double structure that is comprised of a very stiffened core with 300 GPa of Young's modulus, and an extremely soft shell having 30 GPa of Young's modulus. We also confirmed that the oxygen plasma thinning of the perpendicular pillars considerably increased the Young's modulus of the FIB-CVD pillars.
机译：通过聚焦离子束诱导化学气相沉积（FIB-CVD）生长的非晶碳柱被认为形成了圆柱形双结构。在这种结构中，包含源自一次离子的Ga的核被无定形碳壳所包围，该壳由二次电子生长而成，该二次电子是在一次离子渗透的非弹性散射过程中发射的。我们测量了一系列倾斜支柱的杨氏模量。支柱的厚度随着倾斜而减小。但是，直径较小的倾斜支柱的杨氏模量增加。在这里，我们发现这种FIB-CVD柱具有弹性双重结构，该结构由具有300 GPa杨氏模量的非常坚硬的芯和具有30 GPa杨氏模量的极软的壳组成。我们还证实，垂直立柱的氧等离子体变薄大大提高了FIB-CVD立柱的杨氏模量。

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