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首页> 外文期刊>Japanese Journal of Applied Physics. Part 1, Regular Papers, Brief Communications & Review Papers >Method of Estimating Dielectric Properties of Dielectric Layers in Low-Temperature-Cofired Ceramic Devices
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Method of Estimating Dielectric Properties of Dielectric Layers in Low-Temperature-Cofired Ceramic Devices

机译：低温共烧陶瓷器件中介电层介电特性的估算方法

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摘要

A method of estimating the dielectric constant (ε) of dielectric layers in low-temperature-cofired ceramic (LTCC) devices was developed. A band-pass filter (BPF) circuit was designed such that its second harmonic frequency (SHF) strongly depended on the ε of the relevant capacitor built in the BPF. The ε-SHF correlation was established by model simulation. The design of the BPF was realized with various dielectric layers, and the measured SHF was used to determine the ε values of the capacitors from the ε-SHF relationship. These ε values were found to be consistent with those of the sintered pellets, prepared with the same dielectrics and process as BPFs. The ε values of the dielectric layers in other LTCC devices were estimated by this method, in which the BPFs made of the same dielectric layers were fired as dummy samples along with the devices.
机译：开发了一种估算低温共烧陶瓷（LTCC）器件中介电层介电常数（ε）的方法。设计了一个带通滤波器（BPF）电路，使其二次谐波频率（SHF）强烈取决于BPF中内置的相关电容器的ε。通过模型仿真建立了ε-SHF相关性。 BPF的设计是通过各种介电层实现的，所测得的SHF用于根据ε-SHF关系确定电容器的ε值。发现这些ε值与使用与BPF相同的电介质和工艺制备的烧结球团的ε值一致。通过这种方法可以估算出其他LTCC器件中介电层的ε值，其中将由相同介电层制成的BPF与器件一起作为虚拟样品进行烧制。

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