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首页> 外文期刊>Japanese Journal of Applied Physics. Part 1, Regular Papers, Brief Communications & Review Papers >Effective Surface Area of SnO_2 -Sputtered Films Evaluated by Measurement of Physical Adsorption Isotherms
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Effective Surface Area of SnO_2 -Sputtered Films Evaluated by Measurement of Physical Adsorption Isotherms

机译：通过测量物理吸附等温线评估SnO_2溅射薄膜的有效表面积

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The microstructure of SnO_2 sputtered films was investigated by field emission electron microscopy (FE-SEM), and by the measurement of film density and physical adsorption isotherms. FE-SEM shows that the SnO_2-sputtered films are composed of columnar grains with thicknesses of about 10-45 nm. The density of the film deposited at a high temperature of 573 K and a low pressure of 0.4 Pa was 6.38 x 10~3 kg/m~3. On the other hand, the density of the film deposited at room temperature and a high pressure of 12Pa was 3.82 x 10~3 kg/m~3. This value is much lower than the bulk density 6.95 x 10~3 kg/m~3, indicating that the film is very porous. According to the results of the physical adsorption isotherms for Kr gas, the effective surface area of this porous film was 91.0 times larger than the apparent surface area, indicating that the columnar grains are mostly isolated by gaps. Furthermore, the density is discussed in relation to the total pore volume determined from pore size distributions.
机译：通过场发射电子显微镜（FE-SEM），并通过测量膜密度和物理吸附等温线，研究了SnO_2溅射膜的微观结构。 FE-SEM表明，SnO_2溅射膜由柱状晶粒组成，厚度约为10-45nm。在573K的高温和0.4Pa的低压下沉积的膜的密度为6.38×10〜3kg / m〜3。另一方面，在室温和12Pa的高压下沉积的膜的密度为3.82×10〜3kg / m〜3。该值远低于堆积密度6.95 x 10〜3 kg / m〜3，表明薄膜非常多孔。根据对Kr气体的物理吸附等温线的结果，该多孔膜的有效表面积是表观表面积的91.0倍，这表明柱状晶粒大部分被间隙隔离。此外，讨论了与由孔径分布确定的总孔体积有关的密度。

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