Microstructure, mechanical properties, and high-temperature oxidation resistance of AlN/SiO_2 nanomultilayer coatings

Ming Kong; Wcnji Zhao; Ying Wu; Bilong Huang; Geyang Li

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Microstructure, mechanical properties, and high-temperature oxidation resistance of AlN/SiO_2 nanomultilayer coatings

机译：AlN / SiO_2纳米多层涂层的组织，力学性能和高温抗氧化性能

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The microstructure, mechanical properties, and high-temperature oxidation resistance of AlN/SiO_2 nanomultilayer coatings with various SiO_2 layer thicknesses were investigated using X-ray diffractometry, high-resolution transmission electron microscopy, scanning electron microscopy, and nanoindentation. The results revealed that SiO_2 formed wurtzite-typed hexagonal pseudo-crystal structures and grew epitaxi-ally with AlN when its thickness was less than 0.6 nm. Meanwhile, the multilayer coatings yielded superhard-ness effect with a maximum hardness of 29.0 GPa. A minute increase in SiO_2 thickness from 0.6 to 0.9 nm would decrease the hardness of the nanomultilayer coatings due to the formation of amorphous SiO_2 and destruction of epitaxial structure. The high hardness of superhard coatings was sustained after high-temperature annealing treatment of up to 800℃. However, a further increase in annealing temperature to 900℃ caused severe oxidation of AlN and thus degradation of coating's hardness.

机译：利用X射线衍射，高分辨率透射电子显微镜，扫描电子显微镜和纳米压痕技术研究了具有不同SiO_2层厚度的AlN / SiO_2纳米多层涂层的组织，力学性能和高温抗氧化性能。结果表明，当SiO_2的厚度小于0.6nm时，SiO_2形成纤锌矿型六方假晶体结构，并与AlN一起外延生长。同时，多层涂层产生了超硬效果，最大硬度为29.0 GPa。 SiO_2厚度从0.6到0.9 nm的微小增加将由于形成非晶SiO_2和破坏外延结构而降低纳米多层涂层的硬度。经过800℃的高温退火处理后，超硬涂层的高硬度得以保持。但是，退火温度进一步提高到900℃会导致AlN严重氧化，从而降低涂层的硬度。

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来源
《Journal of coatings technology and research》 |2012年第2期|p.177-182|共6页
作者
Ming Kong; Wcnji Zhao; Ying Wu; Bilong Huang; Geyang Li;
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作者单位

State Key Laboratory of Metal Matrix Composites,Shanghai Jiao Tong University, Shanghai 200240, China;

State Key Laboratory of Metal Matrix Composites,Shanghai Jiao Tong University, Shanghai 200240, China;

State Key Laboratory of Metal Matrix Composites,Shanghai Jiao Tong University, Shanghai 200240, China;

State Key Laboratory of Metal Matrix Composites,Shanghai Jiao Tong University, Shanghai 200240, China;

State Key Laboratory of Metal Matrix Composites,Shanghai Jiao Tong University, Shanghai 200240, China;

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正文语种 eng
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AIN/SiO_2 nanomultilayer coatings; epitaxial growth; superhardness effect; oxidation resistance;

机译：AIN / SiO_2纳米多层涂层;外延生长超硬度效应抗氧化性;

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8. Phase Relations in the Si3N4-SiO2-MgO System and Their Interrelations with Strength and Oxidation Resistance. Dense Si3N4: Interrelation between Phase Equilibria,Microstructure and Mechanical Properties. [R] . lange, f. f. 1976

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Microstructure, mechanical properties, and high-temperature oxidation resistance of AlN/SiO_2 nanomultilayer coatings

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