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Core-shell photonic band gap structures fabricated using laser-assisted chemical vapor deposition

机译:使用激光辅助化学气相沉积制备的核-壳光子带隙结构

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Laser-assisted chemical vapor deposition (LCVD), in combination with three-dimensional (3D) self-assembly of colloidal silica particles, was used to fabricate 3D core-shell photonic band gap (PBG) structures. Self-assembled multilayer silica particles were formed on silicon substrates using the isothermal heating evaporation approach. A continuous-wave CO_2 laser (10.6 μm wavelength) was used as the energy source in the LCVD to fabricate a silica-core-silicon-shell PBG structure. This technique is capable of fabricating structures with various PBGs by adjusting the silica particle size and Si-shell thickness using different LCVD parameters. This capability enables us to engineer positions and widths of PBGs by flexibly controlling the particle size and shell thicknesses. In the fabricated PBG structures, face-centered cubic structures consist of silica-core-silicon-shell "effective atoms." A series of PBG structures with designed PBGs was obtained under different experimental conditions. Incidence-angle-resolved spectroscopic ellipsometry was used to identify specific PBGs. The refractive indices of the effective atoms with different Si-shell thicknesses were calculated using the Bruggeman composite model. The plain-wave expansion method was used to simulate the photonic dispersion diagrams, which supported the experimental results.
机译:激光辅助化学气相沉积(LCVD)结合胶体二氧化硅颗粒的三维(3D)自组装,可用于制造3D核-壳光子带隙(PBG)结构。使用等温加热蒸发方法在硅基底上形成自组装的多层二氧化硅颗粒。在LCVD中,使用连续波CO_2激光器(波长为10.6μm)作为能量源,以制造硅核-硅壳-PBG结构。该技术能够通过使用不同的LCVD参数调节二氧化硅的粒径和硅壳厚度来制造具有各种PBG的结构。这种功能使我们能够通过灵活地控制颗粒大小和壳厚度来设计PBG的位置和宽度。在制造的PBG结构中,面心立方结构由硅核-硅壳“有效原子”组成。在不同的实验条件下获得了一系列具有设计的PBG的PBG结构。入射角分辨光谱椭圆仪用于鉴定特定的PBG。使用Bruggeman复合模型计算了具有不同硅壳厚度的有效原子的折射率。普通波扩展方法被用来模拟光子色散图,这支持了实验结果。

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