首页> 外文会议>International Congress on Applications of Lasers and Electro-Optics >PARAMETRICAL STUDY OF PHOTONIC BANDGAP STRUCTURES FABRICATED USING LASER-ASSISTED CHEMICAL VAPOR DEPOSITION
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PARAMETRICAL STUDY OF PHOTONIC BANDGAP STRUCTURES FABRICATED USING LASER-ASSISTED CHEMICAL VAPOR DEPOSITION

机译:使用激光辅助化学气相沉积制造光子带隙结构的参数研究

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Laser-assisted chemical vapor deposition (LCVD), in combination with 3-D self-assembly of colloidal silica particles, was used to fabricate 3-D photonic bandgap (PBG) structures. Multilayer of colloidal silica particles was formed on silicon substrates using the isothermal heating evaporation approach. A continuous wave (CW) CO{sub}2 laser (10.6 μm wavelength) was used as the energy source in the LCVD process. A silica-core-silicon-shell PBG structure was obtained. This technique is capable of fabricating structures with various PBGs by obtaining different silicon shell thickness with different LCVD parameters. This enables us to engineer the position and width of PBGs by flexibly controlling the core-shell geometry. Face-centered cubic (FCC) PBG structures were composed by "effective atom" of silica-core-silicon-shell. In this study, a series of PBG structures with designed PBGs were obtained with different experimental conditions. Incidence-angle-resolved spectroscopic ellipsometer was used to identify specific PBGs. The refractive indices of the "effective atom" with different silicon-shell thickness were calculated using Bruggeman composite model. The plain-wave expansion was used to simulate the photonic dispersion diagrams, which agreed with the experimental results.
机译:激光辅助化学气相沉积(LCVD)与胶体二氧化硅颗粒的3-D自组装组合,用于制造3-D光子带隙(PBG)结构。使用等温加热蒸发方法在硅基衬底上形成胶体二氧化硅颗粒的多层。连续波(CW)Co {Sub} 2激光器(10.6μm波长)用作LCVD工艺中的能量源。获得二氧化硅芯 - 硅壳PBG结构。该技术能够通过以不同的LCVD参数获得不同的硅壳厚度来制造具有各种PBG的结构。这使我们能够通过灵活地控制核心壳几何来设计PBG的位置和宽度。面为中心的立方(FCC)PBG结构由二氧化硅芯 - 硅 - 壳的“有效原子”组成。在该研究中,通过不同的实验条件获得了一系列具有设计PBG的PBG结构。抗震率分辨的光谱椭圆仪用于鉴定特定的PBG。使用Bruggeman复合模型计算具有不同硅壳厚度的“有效原子”的折射率。普通波扩展用于模拟光子分散图,该图与实验结果一致。

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