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Spherical silicon-shell photonic band gap structures fabricated by laser-assisted chemical vapor deposition

机译：激光辅助化学气相沉积制备的球形硅壳光子带隙结构

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摘要

Laser-assisted chemical vapor deposition was applied in fabricating three-dimensional (3D) spherical-shell photonic band gap (PBG) structures by depositing silicon shells covering silica particles, which had been self-assembled into 3D colloidal crystals. The colloidal crystals of self-assembled silica particles were formed on silicon substrates using the isothermal heating evaporation approach. A continuous wave Nd:YAG laser (1064 nm wavelength) was used to deposit silicon shells by thermally decomposing disilane gas. Periodic silicon-shell/silica-particle PBG structures were obtained. By removing the silica particles enclosed in the silicon shells using hydrofluoric acid, hollow spherical silicon-shell arrays were produced. This technique is capable of fabricating structures with complete photonic band gaps, which is predicted by simulations with the plane wave method. The techniques developed in this study have the potential to flexibly engineer the positions of the PBGs by varying both the silica particle size and the silicon-shell thickness. Ellipsometry was used to investigate the specific photonic band gaps for both structures.
机译：通过沉积覆盖自组装成3D胶体晶体的二氧化硅颗粒的硅壳，将激光辅助化学气相沉积法应用于制造三维（3D）球形壳光子带隙（PBG）结构。使用等温加热蒸发方法在硅基板上形成自组装二氧化硅颗粒的胶体晶体。连续波Nd：YAG激光（波长为1064 nm）用于通过热分解乙硅烷气体来沉积硅壳。获得了周期性的硅壳/二氧化硅颗粒PBG结构。通过使用氢氟酸去除封装在硅壳中的二氧化硅颗粒，制得了空心球形硅壳阵列。该技术能够制造具有完整光子带隙的结构，这是通过使用平面波方法进行模拟来预测的。这项研究中开发的技术具有通过改变二氧化硅粒径和硅壳厚度来灵活设计PBG位置的潜力。椭偏法用于研究两种结构的特定光子带隙。

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  • 来源
    《Journal of Applied Physics》 |2007年第3期|p.033129.1-033129.5|共5页
  • 作者

    H. Wang; Z. Y. Yang; Y. F. Lu;

  • 作者单位

    Department of Electrical Engineering, University of Nebraska-Lincoln, Lincoln, Nebraska 68588-0511;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 应用物理学;计量学;
  • 关键词

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