Structural characterization of annealed Si_(1-x)C_x/SiC multilayers targeting formation of Si nanocrystals in a SiC matrix

Dengyuan Song; Eun-Chel Cho; Gavin Conibeer; Yidan Huang; Chris Flynn; Martin A. Green

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Structural characterization of annealed Si_(1-x)C_x/SiC multilayers targeting formation of Si nanocrystals in a SiC matrix

机译：旨在在SiC基质中形成Si纳米晶体的退火Si_（1-x）C_x / SiC多层膜的结构表征

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Amorphous Si_(1-x)C_x/SiC multilayer films were prepared by alternating deposition of Si-rich Si_(1-x)C_x and near-stoichiometric SiC layers by using magnetron sputtering. The as-deposited films were annealed at different temperatures (T_a) from 800 to 11

机译：通过使用磁控溅射交替沉积富硅的Si_（1-x）C_x和接近化学计量的SiC层来制备非晶Si_（1-x）C_x / SiC多层膜。所沉积的薄膜在800至11的不同温度（T_a）下退火

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来源
《Journal of Applied Physics》 |2008年第8期|524-530|共7页
作者
Dengyuan Song; Eun-Chel Cho; Gavin Conibeer; Yidan Huang; Chris Flynn; Martin A. Green;
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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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专利

1. Annealing of nm-thin Si_(1-x)C_x/SiC multilayers [J] . Künle M., Janz S., Nickel K.G., Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion . 2013,第Null期

机译：纳米Si_（1-x）C_x / SiC多层薄膜的退火
2. Formation of α-Si_(1-x)C_x:H and nc-SiC films grown by HWCVD under different process pressure [J] . Tianru Wu, Honglie Shen, Bin Cheng, Applied Surface Science . 2011,第3期

机译：HWCVD在不同工艺压力下生长的α-Si_（1-x）C_x：H和nc-SiC薄膜的形成
3. Structural, optical and electrical properties of silicon nanocrystals embedded in Si_xC_(1-x)/SiC multilayer systems for photovoltaic applications [J] . J. Lopez-Vidrier, S. Hernandez, J. Sama, Materials Science and Engineering . 2013,第9期

机译：嵌入光伏应用的Si_xC_（1-x）/ SiC多层系统中的硅纳米晶体的结构，光学和电学性质
4. STRUCTURAL AND OPTICAL PROPERTIES OF SILICON NANOCRYSTALS IN SiC MATRIX PREPARED BY SPUTTERED Si_(1-X)C_X/SiC MULTILAYERS [C] . Dengyuan Song, Eun-Chel Cho, Young-Hyun Cho, European photovoltaic solar energy conference . 2007

机译：溅射Si_（1-X）C_X / SiC多层膜制备的SiC基体中硅纳米晶的结构和光学性质
5. Fabrication of mullite-bonded porous SiC ceramics from multilayer-coated SiC particles through sol-gel and in-situ polymerization techniques. [D] . Ebrahimpour, Omid. 2014

机译：通过溶胶-凝胶和原位聚合技术从多层涂覆的SiC颗粒制备莫来石键合多孔SiC陶瓷。
6. Comparison of Cyclic Hysteresis Behavior between Cross-Ply C/SiC and SiC/SiC Ceramic-Matrix Composites [O] . Longbiao Li 2016

机译：交叉层C / SiC与SiC / SiC陶瓷基复合材料的循环磁滞行为比较
7. Structural characterization of annealed Si1-x Cx /SiC multilayers targeting formation of Si nanocrystals in a SiC matrix [O] . Song Dengyuan Photovoltaics Renewable Energy Engineering Faculty of Engineering UNSW, Cho E.-C Photovoltaics Renewable Energy Engineering Faculty of Engineering UNSW, Conibeer Gavin Photovoltaics Renewable Energy Engineering Faculty of Engineering UNSW, 2008

机译：旨在在SiC基质中形成Si纳米晶体的退火Si1-x Cx / SiC多层膜的结构表征

Structural characterization of annealed Si_(1-x)C_x/SiC multilayers targeting formation of Si nanocrystals in a SiC matrix

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