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首页> 外文期刊>Journal of Applied Physics >Growth behavior of oxide nanostructures by electrical and thermal conductivities of substrate in atomic force microscope nano-oxidation
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Growth behavior of oxide nanostructures by electrical and thermal conductivities of substrate in atomic force microscope nano-oxidation

机译：原子力显微镜纳米氧化过程中衬底的电导率和导热率对氧化物纳米结构的生长行为

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摘要

We report the growth behavior of oxide nanostructures according to physical properties such as work function, electrical and thermal conductivities, and roughness for high resolution nanostructure fabrication. Among these factors, threshold voltages, in particular, which induced the formation of a water meniscus and driving voltage, which drive oxyanions for oxidation, decreased as the mobility of electrons increased by the increasing electrical conductivity. Oxide growth increased as the diffusion of OH radical increased by the increasing conductivity of thermal energy. The high electrical and thermal conductivities imply that the reaction of the OH radical and surface was more easily activated over a wide reaction region (in the parallel direction of substrate) by the conductivity of the generated thermal energy at a low driving voltage. On the basis of these conductivity effects, the Cr film, which is the most sensitive to electron transport and conductivities, had hill-shaped nanostructures and could be applied as a candidate for high-speed atomic force microscope lithography at the lowest driving voltage. In addition, Ta and Ti, which are less sensitive, can be used to fabricate nanostructures with a high aspect ratio (spike shape).
机译：我们根据物理性质（例如功函，电导率和导热率以及用于高分辨率纳米结构制造的粗糙度）报告了氧化物纳米结构的生长行为。在这些因素中，随着电子迁移率的增加，特别是引起水弯月面形成的阈值电压和驱动氧化氧阴离子的驱动电压随着电子的迁移率的增加而降低。随着热能传导率的增加，氧化物的增长随着OH自由基的扩散而增加。高的电导率和热导率意味着，由于在低驱动电压下产生的热能的电导率，OH自由基与表面的反应在较宽的反应区域（沿基板的平行方向）上更容易被激活。基于这些电导率效应，对电子传输和电导率最敏感的Cr膜具有山形的纳米结构，可以在最低驱动电压下用作高速原子力显微镜光刻的候选材料。此外，不太敏感的Ta和Ti可用于制造具有高纵横比（尖峰形状）的纳米结构。

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