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首页> 外文期刊>Journal of Applied Physics >Electron dynamics in low pressure capacitively coupled radio frequency discharges
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Electron dynamics in low pressure capacitively coupled radio frequency discharges

机译：高压电容耦合射频放电的电子动力学

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摘要

In low temperature plasmas, the interaction of the electrons with the electric field is an important current research topic that is relevant for many applications. Particularly, in the low pressure regime (≤10 Pa), electrons can traverse a distance that may be comparable to the reactor dimensions without any collisions. This causes "nonlocal," dynamics which results in a complicated space- and time-dependence and a strong anisotropy of the distribution function. Capacitively coupled radio frequency (CCRF) discharges, which operate in this regime, exhibit extremely complex electron dynamics. This is because the electrons interact with the space- and time-dependent electric field, which arises in the plasma boundary sheaths and oscillates at the applied radio frequency. In this tutorial paper, the fundamental physics of electron dynamics in a low pressure electropositive argon discharge is investigated by means of particle-in-cell/Monte Carlo collisions simulations. The interplay between the fundamental plasma parameters (densities, fields, currents, and temperatures) is explained by analysis (aided by animations) with respect to the spatial and temporal dynamics. Finally, the rendered picture provides an overview of how electrons gain and lose their energy in CCRF discharges.
机译：在低温等离离子中，电子与电场的相互作用是一种与许多应用相关的重要电流研究主题。特别地，在低压调节（≤10Pa）中，电子可以横穿可能与反应器尺寸相当的距离而没有任何冲突。这会导致“非本体”动态，导致复杂的空间和时间依赖性和分布函数的强烈各向异性。在该制度中操作的电容耦合射频（CCRF）放电呈现出极其复杂的电子动力学。这是因为电子与空间和时间依赖的电场相互作用，其在等离子体边界护套中产生并以所应用的射频振荡。在本辅导纸中，通过粒子内/蒙特卡罗碰撞模拟研究了低压正电性氩气中的电子动力学的基本物理学。基本等离子体参数（密度，字段，电流和温度）之间的相互作用是通过关于空间和时间动态的分析（动画）来解释。最后，渲染图片概述了电子如何增益和在CCRF放电中失去能量。

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  • 来源
    《Journal of Applied Physics》 |2020年第18期|181101.1-181101.26|共26页
  • 作者

    S. Wilczek; J. Schulze; R. P. Brinkmann; Z. Donko; J. Trieschmann; T. Mussenbrock;

  • 作者单位

    Department of Electrical Engineering and Information Science Ruhr University Bochum D-44780 Bochum Germany;

    Department of Electrical Engineering and Information Science Ruhr University Bochum D-44780 Bochum Germany School of Physics Dalian University of Technology 116024 Dalian China;

    Department of Electrical Engineering and Information Science Ruhr University Bochum D-44780 Bochum Germany;

    Institute for Solid State Physics and Optics Wigner Research Centre for Physics Konkoly-Thege Miklos str. 29-33 H-1121 Budapest Hungary;

    Electrodynamics and Physical Electronics Group Brandenburg University of Technology Cottbus-Senftenberg Siemens-Halske-Ring 14 D-03046 Cottbus Germany;

    Electrodynamics and Physical Electronics Group Brandenburg University of Technology Cottbus-Senftenberg Siemens-Halske-Ring 14 D-03046 Cottbus Germany;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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  • 正文语种 eng
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