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Novel design for performance enhancement of a touch-mode capacitive pressure sensor: theoretical modeling and numerical simulation

机译:用于增强触摸模式电容式压力传感器性能的新颖设计:理论建模和数值模拟

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摘要

Capacitive pressure sensors have undergone a multitude of design modifications to improve their performance for various applications. This paper aims to add a novel feature to increase the capacitance generated by using a convex dome-shaped substrate electrode. The paper provides in-depth mathematical and analytical modeling that supports the proposed design. The results indicate a significant improvement in capacitance, touch-mode range, and linearity for the touch-mode capacitive pressure sensor.
机译:电容式压力传感器经过了许多设计修改,以提高其在各种应用中的性能。本文旨在增加一个新颖的功能,以增加使用凸形圆顶形基板电极产生的电容。本文提供了支持所建议设计的深入数学和分析模型。结果表明,触摸模式电容式压力传感器的电容,触摸模式范围和线性度都有显着改善。

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