Response surface modeling of the composition of AIAs_ySb_1-y alloys grown by molecular beam epitaxy

P.Gopaladasu; J.L.Cecchi; K.J.Malloy

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Response surface modeling of the composition of AIAs_ySb_1-y alloys grown by molecular beam epitaxy

机译：分子束外延生长的AIAs_ySb_1-y合金成分的响应面建模

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摘要

We have developed an empirical model of AIAs_ySb_1-y composition during molecular beam epitaxy as a function of growth temperature, growth rate, As_2-flux, and Sb_2-flux, and Sb_2-flux, using response surface methodology. In order to facilitate data collection from a large number of experiments, we have applied desorption mass spectroscopy as an in situ measure of alloy composition.

机译：我们使用响应面方法开发了分子束外延过程中AIAs_ySb_1-y组成与生长温度，生长速率，As_2-通量和Sb_2-通量以及Sb_2-通量的函数关系的经验模型。为了便于从大量实验中收集数据，我们将解吸质谱法用作合金成分的原位测量。

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来源
《Journal of Crystal Growth》 |2001年第4期|p.556-560|共5页
作者
P.Gopaladasu; J.L.Cecchi; K.J.Malloy;
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作者单位

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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
原文格式 PDF
正文语种 eng
中图分类晶体学;
关键词
A1.Design of experiments; A1.Desorption mass spectrometry; A3.Molecular beam epitaxy;

机译：A1。实验设计;A1。解吸质谱A3。分子束外延;

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Response surface modeling of the composition of AIAs_ySb_1-y alloys grown by molecular beam epitaxy

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