...
首页> 外文期刊>Journal of Crystal Growth >Metalorganic vapor phase epitaxy of InN on GaN using tertiary- butylhydrazine as nitrogen source
【24h】

Metalorganic vapor phase epitaxy of InN on GaN using tertiary- butylhydrazine as nitrogen source

机译:叔丁基肼为氮源的GaN上InN的金属有机气相外延

获取原文
获取原文并翻译 | 示例
           

摘要

The growth of InN on GaN/sapphire by metalorganic vapor-phase epitaxy (MOVPE) using tertiary-butylhydrazine (tBHy) was studied by varying temperature, V/III-ratio, growth time and carrier gas between nitrogen and hydrogen. The growth was characterized in-situ by spectroscopic ellipsometry and ex-situ by high resolution X-ray diffraction, atomic force microscopy and scanning electron microscopy. In contrast to ammonia, it was predicted that tBHy should allow InN growth for a much wider growth window and low V/III-ratios with growth temperatures below 600 C. However, over a wide range of growth parameters only growth of metallic indium droplets was observed.
机译:通过改变温度,V / III比,生长时间和载气在氮气和氢气之间的变化,研究了使用叔丁基肼(tBHy)的金属有机气相外延(MOVPE)在GaN /蓝宝石上InN的生长。通过椭圆偏振光谱原位表征生长,通过高分辨率X射线衍射,原子力显微镜和扫描电子显微镜异位生长。与氨相反,据预测,tBHy应该允许InN生长,以实现更宽的生长窗口和低的V / III比,且生长温度低于600C。但是,在宽范围的生长参数下,仅金属铟液滴的生长观测到的。

著录项

  • 来源
    《Journal of Crystal Growth》 |2010年第13期|P.1983-1985|共3页
  • 作者单位

    Technische Universitaet Berlin, Institute of Solid State Physics, EW 6-1, Hardenbergstrasse 36, D-10623 Berlin, Germany;

    rnTechnische Universitaet Berlin, Institute of Solid State Physics, EW 6-1, Hardenbergstrasse 36, D-10623 Berlin, Germany;

    Technische Universitaet Berlin, Institute of Solid State Physics, EW 6-1, Hardenbergstrasse 36, D-10623 Berlin, Germany;

    Technische Universitaet Berlin, Institute of Solid State Physics, EW 6-1, Hardenbergstrasse 36, D-10623 Berlin, Germany;

    Technische Universitaet Berlin, Institute of Solid State Physics, EW 6-1, Hardenbergstrasse 36, D-10623 Berlin, Germany;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    A1. Surface structure; A3. Metalorganic vapor phase epitaxy; B1. Nitrides; B2. Semiconducting III-V materials;

    机译:A1。表面结构;A3。金属有机气相外延;B1。氮化物;B2。半导体III-V材料;

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号