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首页> 外文期刊>Journal of Crystal Growth >Seeded growth of AlN bulk crystals in m- and c-orientation
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Seeded growth of AlN bulk crystals in m- and c-orientation

机译:AlN块状晶体在m和c方向上的种子生长

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摘要

Seeded growth of AlN boules was achieved on m-(1010) and c-(0001) orientations by physical vapor transport (PVT). The single crystalline m- and c-plane seeds were cut from freestanding AlN single crystals. A1N boules 12 mm in diameter and 7 mm in height were grown at source temperatures around 2280 ℃ in N_2 atmosphere at 500 Torr of total pressure. Under identical process conditions, the m- and c-plane boules exhibited the same growth rates, 150-170 μm/h, and similar expansion angles, 22-27°, which indicated that the growth was controlled by the thermal profile inside the crucible rather than by crystallographic differences. X-ray rocking curve analysis and Raman spectroscopy confirmed that both m- and c-plane grown crystals possessed high crystalline quality. The dislocation density in both crystals was non-uniform and in the range 10~2-10~5 cm~(-2), as characterized by X-ray topography.
机译:通过物理气相传输(PVT)在m-(1010)和c-(0001)方向上实现了AlN圆棒的种子生长。从独立的AlN单晶切出单晶m和c平面晶种。在N_2大气中,总压力为500 Torr时,在2280℃左右的源温度下,生长直径为12 mm,高度为7 mm的A1N圆棒。在相同的工艺条件下,m平面和c平面的球棒具有相同的生长速率150-170μm/ h,并且具有相似的膨胀角22-27°,这表明生长受坩埚内部的热分布控制而不是通过晶体学差异。 X射线摇摆曲线分析和拉曼光谱证实,m和c平面生长的晶体都具有较高的晶体质量。 X射线形貌特征表明,两种晶体的位错密度均不均匀,在10〜2-10〜5 cm〜(-2)范围内。

著录项

  • 来源
    《Journal of Crystal Growth》 |2009年第1期|58-63|共6页
  • 作者单位

    Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC 27695, USA;

    Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC 27695, USA;

    HexaTech, Inc., 991 Aviation Pkwy., Suite 800, Morrisville, NC 27560, USA;

    Department of Physics and Astronomy, Georgia State University, Atlanta, GA 30303, USA;

    Department of Physics and Astronomy, Georgia State University, Atlanta, GA 30303, USA;

    Department of Materials Science and Engineering, State University of New York at Stony Brook, Stony Brook, NY 11794, USA;

    Department of Materials Science and Engineering, State University of New York at Stony Brook, Stony Brook, NY 11794, USA;

    Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC 27695, USA;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    A1. High resolution X-ray diffraction; A1. Substrates; A1. X-ray topography; A2. Growth from vapor; A2. Seeded vapor growth; B1. Nitrides;

    机译:A1。高分辨率X射线衍射;A1。基材;A1。 X射线形貌;A2。蒸气生长;A2。种子蒸气生长;B1。氮化物;

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