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首页> 外文期刊>Journal of Crystal Growth >Geostrophic turbulence in CZ silicon crucible
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Geostrophic turbulence in CZ silicon crucible

机译:CZ硅坩埚中的地转湍流

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In the CZ silicon process, silicon melt convection is affected by the Corilis force as a rotating fluid system. As a result, a special fluid motion called baroclinic instability appears and disturbs the single crystal growth. Since the Coriolis force will increaswse the curvature of the fluid particle paths, when the curvature exceeds the crucible size, another unstable fluid motion, the so-called geostrophic turbulence, is expected to occur at higher Taylor numbers. This study investigates the geostrophic turbulence by numerical flow simulation and experimental observations in an actual CZ crucible. In the numerical flow simulation, we solved 3D differential equations on a cylindrical lattice of 80×60×65 points, where the Rayleigh number of the system was fixed to be 2.7 ×10~7. With the Taylor number higher than 1×10~11, the calculated fluid motion and temperature structure produce a polka-dot pattern, which continues from the melt surface to the bottom. When the Taylor number is increase, the vertical voracity component increases extremely. In the actual CZ crucible, temperature profiles on the melt surface were recorded by video camera thermometer in the same conditions as in the numerical simulation. The thermal images of the melt surface also show a fluctuating polka-dot pattern consisting of high temperature areas as seen in the numerical simulation results. The size and amplitude of the high temperature areas decrease with increase of the Taylor number, thus thermal clusters will relax the radial gradient and fluctuations. The Fourier power spectrum of the time d
机译:在CZ硅工艺中,硅熔体对流受旋转流体系统的Corilis力影响。结果,出现了一种特殊的流体运动,称为斜压不稳定性,并扰乱了单晶的生长。由于科里奥利力将增加流体粒子路径的曲率,因此当曲率超过坩埚尺寸时,预计在更高的泰勒数下会发生另一种不稳定的流体运动,即所谓的地转湍流。本研究通过数值流模拟和在实际CZ坩埚中的实验观察来研究地转湍流。在数值流模拟中,我们在80×60×65点的圆柱晶格上求解了3D微分方程,其中系统的瑞利数固定为2.7×10〜7。当泰勒数大于1×10〜11时,计算出的流体运动和温度结构会产生从熔体表面到底部连续的圆点图案。当泰勒数增加时,垂直孔隙率分量极大地增加。在实际的CZ坩埚中,在与数值模拟相同的条件下,通过摄像机温度计记录熔体表面的温度曲线。熔体表面的热图像还显示出由高温区域组成的波动的圆点图案,如数值模拟结果所示。高温区域的大小和振幅随着泰勒数的增加而减小,因此,热团簇将缓解径向梯度和波动。时间d的傅立叶功率谱

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