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首页> 外文期刊>Journal of Crystal Growth >A gas-source MBE growth study of strained Ga_1-xIn_xP layers on GaAs
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A gas-source MBE growth study of strained Ga_1-xIn_xP layers on GaAs

机译:GaAs应变Ga_1-xIn_xP层的气源MBE生长研究

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摘要

The growht of strained Ga_1-xIn_xP alloys on GaAs substrate with the indium composition varying from 0 (GaP) to 1 (InP) was studied by means of reflection high-energy electron diffraction (RHEED). Compressive laeyrs (x>0.48) exhibit an InGaAs-like behavior. Below 2/100 misfit strain (x≤0.75) plastic relaxation occurs before the 2D-3D growth mode transition for which the lattice parameter relaxatoin is observed directly on the RHEED pattern. However, growth temperature has not a strong inflece on the relaxation behavior as in the InGaAs/InP system. On the other hand, if layers under tensile strain have a normal behavior at low temeprautre, the critical thickness is found ot be independent of the composition for x<0.35 at high tempoerature (520 deg C). This unusual behavior, as comapred ot strained InGaAs on InP layers for instance, could be associated to a spinodal decomposiiton of the GaInP alloy.
机译:通过反射高能电子衍射(RHEED)研究了铟成分从0(GaP)到1(InP)变化的GaAs衬底上应变Ga_1-xIn_xP合金的生长。压缩层(x> 0.48)表现出类似InGaAs的行为。低于2/100失配应变(x≤0.75)时,在2D-3D生长模式转变之前会发生塑性松弛,为此,在RHEED图案上直接观察到晶格参数松弛。但是,生长温度并没有像InGaAs / InP系统中那样强烈地影响弛豫行为。另一方面,如果处于拉伸应变下的层在低温度下具有正常行为,则发现临界厚度与高温(520℃)下x <0.35的成分无关。这种不寻常的行为,例如在InP层上共同应变的InGaAs,可能与GaInP合金的旋节线分解有关。

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