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Effects of Thin Film Layers on Actuating Performance of Microheaters

机译:薄膜层对微型加热器驱动性能的影响

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We investigated effects of thin film layers on actuating performance of microheaters. Bubble behaviors on microheaters were observed experimentally, and heat conduction characteristics in thin film layers were analyzed numerically. Nine kinds of tantalum nitride (TaN) microheaters were prepared. Step-stress test showed that voltage limits of nonpassivated heaters were < 50% of those of passivated heaters. Open pool bubble test was carried out using deionized water as a working fluid. Nonpassivated heaters produced comparable bubbles with only 20-50% of input energy required for passivated heaters. However, nonpassivated heaters could be operated only in a narrow range of driving voltage. We constructed a hybrid model for bubble nucleation prediction correlating nucleation times with driving powers. Based on work of bubble formation estimated from bubble volume evolution, actuation efficiencies of microheaters were calculated and compared. Efficiencies of nonpassivated heaters were much higher than those of passivated heaters. However, nonpassivated heaters failed to show robust actuating characteristics over a wide range of power density. As promising microactuators, nonpassivated heaters need further investigation from a viewpoint of reliability.
机译:我们研究了薄膜层对微型加热器驱动性能的影响。实验观察了微加热器上的气泡行为,并对薄膜层的导热特性进行了数值分析。制备了九种氮化钽(TaN)微型加热器。阶跃压力测试表明,非钝化加热器的电压极限小于钝化加热器的电压极限的50%。使用去离子水作为工作液进行开池气泡测试。非钝化加热器产生的气泡相当,钝化加热器仅需要输入能量的20-50%。但是,非钝化加热器只能在狭窄的驱动电压范围内运行。我们构建了气泡成核预测的混合模型,将成核时间与驱动力相关联。根据根据气泡体积演变估算的气泡形成功,计算并比较了微型加热器的驱动效率。非钝化加热器的效率远远高于钝化加热器。但是,非钝化加热器无法在很宽的功率密度范围内显示出强大的驱动特性。作为有前景的微致动器,非钝化加热器需要从可靠性的角度进行进一步研究。

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