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首页> 外文期刊>Journal of Manufacturing Processes >Fabrication of micro-channels on Al_2O_3/TiC ceramics using picosecond laser induced plasma micromachining
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Fabrication of micro-channels on Al_2O_3/TiC ceramics using picosecond laser induced plasma micromachining

机译：皮秒激光诱导等离子体微加工在Al_2O_3 / TiC陶瓷上制备微通道

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摘要

Laser induced plasma micromachining (LIPMM) using a 10 ps laser was applied to create micro-channels on the surface of Al2O3/TiC ceramic. Micro-channels were firstly created by direct laser ablation and LIPMM to comparatively assess the machining ability of two processes. The results showed that LIPMM could create micro-channels with a higher depth and better surface morphologies as compared to direct laser ablation. Subsequently, the influence of laser parameters during LIPMM like pulse energy, scanning speed and frequency on the machining characteristics was investigated. The machined depth of the micro-channel increased with an increase in pulse energy, meanwhile an increase in frequency or a decrease in scanning speed increased the overlap, leading to an increment of the machined depth as well. The pulse energy, scanning speed and frequency had a slight effect on the machined width. The width of heat affected zone increased with the increasing overlap and pulse energy.
机译：施加使用10 ps激光的激光诱导等离子体微加工（LIPMM），以在Al2O3 / TiC陶瓷表面上创建微通道。首先通过直接激光烧蚀和LIPMM创建微通道，以比较评估两个过程的加工能力。结果表明，与直接激光烧蚀相比，LIPMM可以创建具有更高深度和更好表面形貌的微通道。随后，研究了LIPMM期间激光参数如脉冲能量，扫描速度和频率对加工特性的影响。微通道的加工深度随着脉冲能量的增加而增加，同时频率的增加或扫描速度的降低也增加了重叠，从而导致加工深度的增加。脉冲能量，扫描速度和频率对加工宽度略有影响。热影响区的宽度随着重叠和脉冲能量的增加而增加。

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