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首页> 外文期刊>Journal of Manufacturing Processes >Fabrication of micro-channels on Al_2O_3/TiC ceramics using picosecond laser induced plasma micromachining
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Fabrication of micro-channels on Al_2O_3/TiC ceramics using picosecond laser induced plasma micromachining

机译：使用PICOSECOND激光诱导等离子体微机械制造AL_2O_3 / TIC陶瓷上的微通道

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摘要

Laser induced plasma micromachining (LIPMM) using a 10 ps laser was applied to create micro-channels on the surface of Al2O3/TiC ceramic. Micro-channels were firstly created by direct laser ablation and LIPMM to comparatively assess the machining ability of two processes. The results showed that LIPMM could create micro-channels with a higher depth and better surface morphologies as compared to direct laser ablation. Subsequently, the influence of laser parameters during LIPMM like pulse energy, scanning speed and frequency on the machining characteristics was investigated. The machined depth of the micro-channel increased with an increase in pulse energy, meanwhile an increase in frequency or a decrease in scanning speed increased the overlap, leading to an increment of the machined depth as well. The pulse energy, scanning speed and frequency had a slight effect on the machined width. The width of heat affected zone increased with the increasing overlap and pulse energy.
机译：使用10SPS激光器的激光诱导等离子体微机械线（LIPMM）用于在AL2O3 / TIC陶瓷表面上产生微通道。首先通过直接激光烧蚀和脂质产生微通道，以相对评估两种方法的加工能力。结果表明，与直接激光烧蚀相比，脂质可能会产生具有更高深度和更好的表面形态的微通道。随后，研究了激光参数在加工特性上的脉冲能量，扫描速度和频率相同的唇脂期间的影响。微通道的加工深度随脉冲能量的增加而增加，同时频率的增加或扫描速度的降低增加了重叠，导致加工深度的增量。脉冲能量，扫描速度和频率对加工宽度有轻微影响。随着重叠和脉冲能量的增加，热影响区的宽度增加。

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