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Evaluating the effects of pillar shape and gallium ion beam damage on the mechanical properties of single crystal aluminum nanopillars

机译:评估柱状和镓离子束损伤对单晶铝纳米铝纳米铝的力学性能的影响

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摘要

In situ TEM nanopillar compression experiments are widely used to study the mechanical behavior of nanoscale materials. Often, the pillars are fabricated using gallium-focused ion beam (FIB) milling from a bulk sample. During the FIB process, the choice of the pillar shape and the energy of the Ga ions can significantly impact the mechanical performance of samples with electron-transparent dimensions. Here, we systematically explore the effects of various pillar fabrication parameters in a single crystal aluminum (Al) system with a well-controlled crystal orientation. A novel method is proposed to fabricate square pillars to minimize FIB artifacts such as tapering, high pillar base compliance, and preferential deformation at the pillar tip. These square pillars enable more uniform deformation and accurate measurement of the engineering strain. Lastly, we show an intriguing in situ TEM laser irradiation experiment, which has enabled direct visualization of the surface oxide layer in FIB-fabricated Al pillars.
机译:在原位TEM纳米玻璃质压缩实验中广泛用于研究纳米级材料的力学行为。通常,使用聚焦聚焦离子束(FIB)研磨的柱从散装样品中研磨。在FIB过程中,柱形的选择和Ga离子的能量可以显着影响样品的机械性能,具有电子透明尺寸。这里,我们系统地探讨了具有良好控制的晶体取向的单晶铝(Al)系统中各种柱制造参数的效果。提出了一种新的方法来制造正方形柱,以使FIB伪像诸如锥形,高柱基准依从性和优先变形的FIB伪像最小化。这些方形柱能够更均匀的变形和精确测量工程应变。最后,我们在原位TEM激光照射实验中表现出有趣,其能够在制造FIB制造的Al柱中的表面氧化物层的直接可视化。

著录项

  • 来源
    《Journal of Materials Research》 |2021年第12期|2515-2528|共14页
  • 作者单位

    Lawrence Berkeley National Laboratory National Center for Electron Microscopy Molecular Foundry Berkeley CA USA;

    Department of Materials Science and Engineering University of California Berkeley CA USA;

    Department of Materials Science and Engineering CAS Key Lab of Materials for Energy Conversion University of Science and Technology of China Anhui China;

    Materials Sciences Division Lawrence Berkeley National Laboratory Berkeley CA USA;

    Department of Materials Science and Engineering University of California Berkeley CA USA Institut fuer Physik Humboldt-Universitaet zu Berlin Newtonstraβe 15 12489 Berlin Germany;

    Department of Materials Science and Engineering University of California Berkeley CA USA;

    Department of Materials Science and Engineering University of California Berkeley CA USA;

    Materials Sciences Division Lawrence Berkeley National Laboratory Berkeley CA USA;

    Department of Mechanical Engineering Stony Brook University Stony Brook NY USA;

    Department of Materials Science and Engineering University of California Berkeley CA USA Materials Sciences Division Lawrence Berkeley National Laboratory Berkeley CA USA;

    Department of Mechanical Engineering University of California Berkeley CA USA;

    Lawrence Berkeley National Laboratory National Center for Electron Microscopy Molecular Foundry Berkeley CA USA Department of Materials Science and Engineering University of California Berkeley CA USA;

    Lawrence Berkeley National Laboratory National Center for Electron Microscopy Molecular Foundry Berkeley CA USA Department of Materials Science and Engineering University of California Berkeley CA USA Materials Sciences Division Lawrence Berkeley National Laboratory Berkeley CA USA;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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  • 正文语种 eng
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