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Polarity of GaN with polar {0001} and semipolar {1011}, {2021}, {1122} orientations by x-ray photoelectron diffraction

机译:通过X射线光电子衍射,具有极性{0001}和半极性{1011},{2021},{1122}取向的GaN极性

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摘要

A fast and nondestructive method for polarity determination of wurtzite GaN crystals based on x-ray photoelectron diffraction (XPD) has been demonstrated. Photoelectron emission from N 1s core level excited by Mg K_α source was found sufficient for the polarity determination of GaN crystals. XPD polar plots from polar GaN {0001} and semipolar GaN{1011}, {2021}, {1122} crystals have been analyzed. Due to dominant electron forward scattering along N-Ga directions, photoelectron intensities either increase or decrease within a relatively narrow emission polar angle range. The slopes of polar plots are found noticeably different in the polar angle range of 20°-25° for (0001) or (0001) crystals, respectively. The semipolar GaN substrates can be divided into two groups, depending on whether m-plane or a-plane is perpendicular to the semipolar surface. It was found that the slopes of the polar plots are different in the angular range of 20°-27° for semipolar GaN{1011}, 10°-22° for GaN{2021} substrates, while for the GaN{1122} semipolar planes, the slopes are different in the range of 0°-15° with respect to the surface normal.
机译:已经证明了一种基于X射线光电子衍射(XPD)的快速,无损测定纤锌矿GaN晶体极性的方法。发现由MgK_α源激发的来自N 1s核能级的光电子发射足以确定GaN晶体的极性。已经分析了来自极性GaN {0001}和半极性GaN {1011},{2021},{1122}晶体的XPD极性图。由于沿N-Ga方向的主要电子正向散射,光电子强度在相对较窄的发射极角范围内增大或减小。对于(0001)或(0001)晶体,极坐标图的斜率在20°-25°的极角范围内发现明显不同。根据m平面或a平面垂直于半极性表面,可以将半极性GaN基板分为两组。已发现,对于半极性GaN {1011},极坐标图的斜率在20°-27°的角度范围内有所不同;对于GaN {2021}衬底,极坐标图的斜率在10°-22°范围内,而对于GaN {1122}半极性平面,斜率相对于表面法线在0°-15°的范围内不同。

著录项

  • 来源
    《Journal of Materials Research》 |2015年第19期|2881-2892|共12页
  • 作者单位

    Institute of Physics, Academy of Sciences of the Czech Republic, Cukrovarnicka 10, 162 53 Prague, Czech Republic;

    Institute of Physics, Academy of Sciences of the Czech Republic, Cukrovarnicka 10, 162 53 Prague, Czech Republic;

    Department of Electrical and Computer Engineering, North Carolina State University, Raleigh, North Carolina 27606, USA;

    Institute of Physics, Academy of Sciences of the Czech Republic, Cukrovarnicka 10, 162 53 Prague, Czech Republic;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
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