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首页> 外文期刊>Journal of Materials Research >Formation of microcones accompanied with ripple patterns in laser-activated plasma CVD of sp~3-bonded BN films
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Formation of microcones accompanied with ripple patterns in laser-activated plasma CVD of sp~3-bonded BN films

机译：Sp〜3键合BN膜的激光激活等离子体CVD中形成微锥并伴有波纹图案

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摘要

Scanning electron microscopic (SEM) observations revealed that individual and independent microcones of sp~3-bonded boron nitride grown by laser-activated plasma chemical vapor deposition were accompanied by ripple patterns spreading around them in the dimension of micrometers or sub-micrometers. The ripples were expanding equidistantly from each other and diminishing as they depart from a cone. The origin of the ripples was attributed to the interference of a direct laser cast on the plane surface and that reflected from the side of a cone; this model was satisfactorily in agreement with the SEM measurement, in which the side surface of a cone was mapped onto the plane surface surrounding the cone in the mathematical meaning of "bijection." This micro-optical effect due to the wave nature of laser was considered to indicate and support the photochemically activated growth reactions in this process.
机译：扫描电子显微镜（SEM）观察表明，通过激光激活等离子体化学气相沉积法生长的sp〜3-键合氮化硼的单个和独立的微锥，伴随着在微米或亚微米尺寸范围内散布的波纹图案。涟漪彼此等距扩展，并随着它们离开圆锥而减小。波纹的起因归因于直接激光投射在平面上以及从圆锥体侧面反射回来的干涉。该模型与SEM测量令人满意，其中以“射流”的数学含义将圆锥的侧面映射到围绕圆锥的平面上。由于激光的波特性，这种微光学效应被认为指示并支持了该过程中的光化学活化生长反应。

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  • 来源
    《Journal of Materials Research》 |2014年第4期|485-491|共7页
  • 作者

    Shojiro Komatsu; Masaharu Shiratani;

  • 作者单位

    Plasma Application Group, National Institute for Materials Science, Tsukuba, Ibaraki 305-0044, Japan;

    Kyushu University, Motooka, Fukuoka 819-0395, Japan;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
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