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首页> 外文期刊>Journal of Materials Research >Nanoindentation cracking in gallium arsenide: Part Ⅱ. TEM investigation
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Nanoindentation cracking in gallium arsenide: Part Ⅱ. TEM investigation

机译：砷化镓的纳米压痕开裂：第二部分。 TEM调查

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摘要

The nanoindentation fracture behavior of gallium arsenide (GaAs) is examined from two perspectives in two parent papers. In the first paper (part Ⅰ), we address the morphology of the crack field induced by different types of indenters by means of in situ nanoindentation inside a scanning electron microscope (SEM) and of cleavage cross-sectioning techniques. In the present paper (part Ⅱ), we investigate the early stage of crack nucleation under wedge nanoindentation through cathodoluminescence and transmission electron microscopy. We find that the apex angle of the wedge indenter influences the dislocation microstructure and, as a consequence, the mechanism of crack nucleation under nanoindentation. The formation of microtwins depends on both the orientation of the indenter with respect to the orientation of the GaAs crystal and on the apex angle of the indenter. For dicing applications of GaAs wafers, it is desirable to have an opening angle of the indenter smaller than 70° to facilitate the formation of precursor cracks.
机译：从两篇文章的两个角度研究了砷化镓（GaAs）的纳米压痕断裂行为。在第一篇论文（第一部分）中，我们通过扫描电子显微镜（SEM）内的原位纳米压痕和裂解截面技术，研究了由不同类型的压头引起的裂纹场的形态。在本文（第二部分）中，我们通过阴极发光和透射电子显微镜研究了楔形纳米压痕下裂纹形核的早期阶段。我们发现楔形压头的顶角影响位错的微观结构，并因此影响纳米压痕下裂纹成核的机理。微孪晶的形成既取决于压头相对于GaAs晶体的取向的方向，也取决于压头的顶角。对于GaAs晶片的切割应用，期望压头的开口角小于70°以促进前体裂纹的形成。

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  • 来源
    《Journal of Materials Research》 |2013年第20期|2799-2809|共11页
  • 作者

    Cedric Pouvreau; Kilian Wasmer; Haiecha Hessler-Wyser; Jean-Daniel Ganiere; Jean-Marc Breguet; Johann Michler; Daniel Schulz; Jacques Henri Giovanola;

  • 作者单位

    Empa, Swiss Laboratories for Materials Science and Technology, Laboratory for Advanced Materials Processing, 3602 Thun, Switzerland Ecole Polytechnique Federale de Lausanne (EPFL), Laboratory for Mechanical Systems Design, CH-1015 Lausanne, Switzerland;

    Empa, Swiss Laboratories for Materials Science and Technology, Laboratory for Advanced Materials Processing, 3602 Thun, Switzerland;

    Ecole Polytechnique Federale de Lausanne (EPFL), Laboratory for Mechanical Systems Design, CH-1015 Lausanne, Switzerland;

    Empa, Swiss Laboratories for Materials Science and Technology, Laboratory for Advanced Materials Processing, 3602 Thun, Switzerland;

    Ecole Polytechnique Federale de Lausanne (EPFL), Laboratory for Mechanical Systems Design, CH-1015 Lausanne, Switzerland;

    Empa, Swiss Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, 3602 Thun, Switzerland;

    Department Advanced Technologies, Bookham AG, CH-8045 Zuerich, Switzerland;

    Ecole Polytechnique Federale de Lausanne (EPFL), Laboratory for Mechanical Systems Design, CH-1015 Lausanne, Switzerland;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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